Metrology Related to the Multilayer Mirrors in an Extreme-Ultraviolet Stepper

2007 ◽  
Author(s):  
C. Tarrio ◽  
S. B. Hill ◽  
I. Ermanoski ◽  
T. B. Lucatorto ◽  
T. E. Madey ◽  
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Extreme Ultraviolet ◽  
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Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

2020 ◽  
Vol 14 (1) ◽  
pp. 124-134 ◽  
Author(s):  
Yu. A. Vainer ◽  
S. A. Garakhin ◽  
S. Yu. Zuev ◽  
A. N. Nechay ◽  
R. S. Pleshkov ◽  
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Extreme Ultraviolet ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Ultraviolet Wavelength

Inhibition of Contamination of Ru-Capped Multilayer Mirrors for Extreme Ultraviolet Lithography Projection Optics by Ethanol

2007 ◽  
Vol 46 (9B) ◽  
pp. 6155-6160 ◽  
Author(s):  
Yukinobu Kakutani ◽  
Masahito Niibe ◽  
Yoshio Gomei ◽  
Hiromitsu Takase ◽  
Shigeru Terashima ◽  
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Extreme Ultraviolet Lithography ◽  
Multilayer Mirrors ◽  
Ultraviolet Lithography ◽  
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Molybdenum-silicon multilayer mirrors for the extreme ultraviolet

1985 ◽  
Vol 24 (6) ◽  
pp. 883 ◽  
Author(s):  
Troy W. Barbee ◽  
Stanley Mrowka ◽  
Michael C. Hettrick
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Extreme Ultraviolet ◽  
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Analysis of buried interfaces in multilayer mirrors using grazing incidence extreme ultraviolet reflectometry near resonance edges

2015 ◽  
Vol 54 (35) ◽  
pp. 10351 ◽  
Author(s):  
M. G. Sertsu ◽  
M. Nardello ◽  
A. Giglia ◽  
A. J. Corso ◽  
C. Maurizio ◽  
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Extreme Ultraviolet ◽  
Grazing Incidence ◽  
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Normal Incidence Multilayer Mirrors For Extreme Ultraviolet Astronomy

1984 ◽  
Author(s):  
Robert A. Stern ◽  
Bernhard M. Haisch ◽  
George Joki ◽  
Richard C. Catura
Keyword(s):  
Extreme Ultraviolet ◽  
Normal Incidence ◽  
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In situ reflectance measurements of soft-x-ray/extreme-ultraviolet Mo/Y multilayer mirrors

1995 ◽  
Vol 20 (12) ◽  
pp. 1450 ◽  
Author(s):  
Claude Montcalm ◽  
Brian T. Sullivan ◽  
Henri Pépin ◽  
M. Chaker ◽  
Sophie Duguay ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Reflectance Measurements
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