Electron density modulation in an asymmetric bipolar pulsed dc magnetron discharge
2015 ◽
Vol 55
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pp. 016101
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1975 ◽
Vol 38
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pp. 246-251
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Keyword(s):
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2011 ◽
Vol 29
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pp. 031305
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2005 ◽
Vol 33
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pp. 346-347
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