Simple lithographic approach for subwavelength structure antireflection

2007 ◽  
Vol 91 (6) ◽  
pp. 061105 ◽  
Author(s):  
Sen Wang ◽  
Xiao Zheng Yu ◽  
Hong Tao Fan
Keyword(s):  
Subwavelength Structure

scholarly journals Design and Fabrication of Moth-Eye Subwavelength Structure with a Waist on Silicon for Broadband and Wide-Angle Anti-Reflection Property

Coatings ◽  
2018 ◽  
Vol 8 (10) ◽  
pp. 360 ◽  
Author(s):  
He Lin ◽  
Mingzhao Ouyang ◽  
Bingxu Chen ◽  
Qifan Zhu ◽  
Jinshuang Wu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Incidence Angle ◽  
Structural Parameters ◽  
Diffraction Order ◽  
Wide Angle ◽  
Subwavelength Structure ◽  
Inductively Coupled ◽  
Beam Laser ◽  
Interferometric Lithography ◽  
Rigorous Coupled Wave

Reflection loss on the optical component surface is detrimental to performance. Several researchers have discovered that the eyes of moths are covered with micro- and nanostructured films that reduce broadband and wide-angle light reflection. This research proposes a new type of moth-eye subwavelength structure with a waist, which is equivalent to a gradient refractive index film layer with high–low–high hyperbolic-type fill factor distribution. The diffraction order characteristics of a moth-eye subwavelength structure are first analyzed using a rigorous coupled wave analysis. The moth-eye structural parameters are optimized within the spectral range of 2–5 μm using the finite-difference time-domain method. The experimental fabrication of the moth-eye structure with a waist array upon a silicon substrate is demonstrated by using three-beam laser interferometric lithography and an inductively coupled plasma process. The experimental and simulation results show good agreement. The experimental results show that the reflectivity of the moth-eye structure with a waist is less than 1.3% when the incidence angle is less than 30°, and less than 4% when the incidence angle is less than 60°. This research can guide the development of AR broadband optical components and wide-angle applications.

Fabrication of Antireflective Subwavelength Structure on Spherical Glass Surface Using Imprinting Process

2010 ◽  
Vol 3 (11) ◽  
pp. 112501 ◽  
Author(s):  
Takamasa Tamura ◽  
Makoto Umetani ◽  
Kazuhiro Yamada ◽  
Yasuhiro Tanaka ◽  
Kenji Kintaka ◽  
...  
Keyword(s):  
Glass Surface ◽  
Subwavelength Structure ◽  
Spherical Glass

scholarly journals Antireflective disordered subwavelength structure on GaAs using spin-coated Ag ink mask

2012 ◽  
Vol 20 (17) ◽  
pp. 19554 ◽  
Author(s):  
Chan Il Yeo ◽  
Ji Hye Kwon ◽  
Sung Jun Jang ◽  
Yong Tak Lee
Keyword(s):  
Subwavelength Structure

scholarly journals High‐efficiency single etch step apodized surface grating coupler using subwavelength structure

2014 ◽  
Vol 8 (6) ◽  
Author(s):  
Daniel Benedikovic ◽  
Pavel Cheben ◽  
Jens H. Schmid ◽  
Dan‐Xia Xu ◽  
Jean Lapointe ◽  
...  
Keyword(s):  
High Efficiency ◽  
Grating Coupler ◽  
Subwavelength Structure ◽  
Surface Grating

A strain induced subwavelength-structure for a haze-free and highly transparent flexible plastic substrate

Nanoscale ◽  
2018 ◽  
Vol 10 (31) ◽  
pp. 14868-14876 ◽  
Author(s):  
Jae Yong Park ◽  
Juyoung Ham ◽  
Illhwan Lee ◽  
Jong-Lam Lee
Keyword(s):  
Plastic Substrate ◽  
Plastic Film ◽  
Subwavelength Structure ◽  
Flexible Displays ◽  
Highly Efficient ◽  
Flexible Plastic Substrate

This paper presents a method to produce subwavelength-scale (<250 nm) AgCl nanostructures on a flexible plastic film, which is indispensable for highly efficient flexible displays.

Studies of Infrared Antireflection Subwavelength Structure on Ge Substrate

2010 ◽  
Vol 30 (6) ◽  
pp. 1745-1748
Author(s):  
徐启远 Xu Qiyuan ◽  
刘正堂 Liu Zhengtang ◽  
李阳平 Li Yangping ◽  
张淼 Zhang Miao
Keyword(s):  
Subwavelength Structure

Abrupt transition from wavelength structure to subwavelength structure in a single-crystal superalloy induced by femtosecond laser

2011 ◽  
Vol 257 (9) ◽  
pp. 4321-4324 ◽  
Author(s):  
Wei Zhang ◽  
Guanghua Cheng ◽  
Qiang Feng ◽  
Lamei Cao ◽  
Fengping Wang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Single Crystal ◽  
Single Crystal Superalloy ◽  
Subwavelength Structure ◽  
Abrupt Transition

Synthesis of Wave Plates Using Multilayered Subwavelength Structure

2004 ◽  
Vol 43 (No. 4A) ◽  
pp. L439-L441 ◽  
Author(s):  
Wanji Yu ◽  
Kazuo Satoh ◽  
Hisao Kikuta ◽  
Tsuyoshi Konishi ◽  
Tsutom Yotsuya
Keyword(s):  
Subwavelength Structure
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