Submicron patterning of a catalyst film by scanning probe nanolithography for a selective chemical vapor deposition of carbon nanotubes

2007 ◽  
Vol 101 (6) ◽  
pp. 066101 ◽  
Author(s):  
P. Parisse ◽  
A. Verna ◽  
M. Rinaldi ◽  
F. Bussolotti ◽  
V. Grossi ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Scanning Probe ◽  
Catalyst Film ◽  
Selective Chemical

Carbon nanotubes grown on different-sized rectangular patterns

2004 ◽  
Vol 19 (6) ◽  
pp. 1803-1807 ◽  
Author(s):  
Lujun Pan ◽  
Yoshikazu Nakayama ◽  
Hideki Shiozaki ◽  
Chikashi Inazumi
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Line Width ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Surface Shape ◽  
Iron Film ◽  
Nucleation Process ◽  
Catalyst Film ◽  
Field Emission Displays

Carbon nanotubes have been synthesized by chemical vapor deposition using a thin iron film as catalyst on the silicon substrate with different-sized rectangular patterns. It is found that the carbon nanotubes grow vertically to the substrate in a high density with a surface shape similar to that of the substrate when the line width of the patterns are larger than 1 μm, However, when the line width of the pattern is reduced to below 0.5 μm, carbon nanotubes cannot grow vertically anymore. This phenomenon might be caused by the relaxation of stress in catalyst film and the coalescence of the catalyst clusters to form particles or grains, which contributes to the migration of catalyst from edge to inner part during the nucleation process. These results are very useful for the fabrication of field-emission displays and other devices using patterned carbon nanotubes.

Selective Chemical Vapor Deposition Synthesis of Double-Wall Carbon Nanotubes on Mesoporous Silica

2005 ◽  
Vol 109 (3) ◽  
pp. 1141-1147 ◽  
Author(s):  
Palanisamy Ramesh ◽  
Toshiya Okazaki ◽  
Risa Taniguchi ◽  
Junichi Kimura ◽  
Toshiki Sugai ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Mesoporous Silica ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Selective Chemical ◽  
Double Wall

Growth behavior of carbon nanotubes on multilayered metal catalyst film in chemical vapor deposition

2003 ◽  
Vol 374 (3-4) ◽  
pp. 222-228 ◽  
Author(s):  
H. Cui ◽  
G. Eres ◽  
J.Y. Howe ◽  
A. Puretkzy ◽  
M. Varela ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Behavior ◽  
Metal Catalyst ◽  
Catalyst Film

Scanning Probe Lithography. 2. Selective Chemical Vapor Deposition of Copper into Scanning Tunneling Microscope-Defined Patterns

Langmuir ◽  
1994 ◽  
Vol 10 (3) ◽  
pp. 615-618 ◽  
Author(s):  
Jonathan K. Schoer ◽  
Claudia B. Ross ◽  
Richard M. Crooks ◽  
Thomas S. Corbitt ◽  
Mark J. Hampden-Smith
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Scanning Tunneling Microscope ◽  
Chemical Vapor ◽  
Scanning Probe ◽  
Scanning Tunneling ◽  
Scanning Probe Lithography ◽  
Tunneling Microscope ◽  
Selective Chemical

Cobalt supported on carbon nanotubes for methane chemical vapor deposition towards carbon nanotubes

2021 ◽  
Author(s):  
Laura Esteves ◽  
Hugo Alvarenga Oliveira ◽  
Y. T. Xing ◽  
Fabio Barboza Passos
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Heterogeneous Catalysis ◽  
Vapor Deposition ◽  
Supported Catalysts ◽  
Chemical Vapor

Carbon nanotubes (CNT) application in heterogeneous catalysis has been attracting growing interest. However, the use of CNT-supported catalysts in the chemical vapor deposition for the production of new CNT is...

Fabrication of short and straight carbon nanotubes by chemical vapor deposition

2008 ◽  
Vol 476 (1-2) ◽  
pp. 230-233 ◽  
Author(s):  
Haipeng Li ◽  
Naiqin Zhao ◽  
Chunnian He ◽  
Chunsheng Shi ◽  
Xiwen Du ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor
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