Production of a helium beam in a focused ion beam machine using an electron beam ion trap

2007 ◽  
Vol 90 (8) ◽  
pp. 083112 ◽  
Author(s):  
F. Ullmann ◽  
F. Großmann ◽  
V. P. Ovsyannikov ◽  
J. Gierak ◽  
G. Zschornack
Keyword(s):  
Electron Beam ◽  
Focused Ion Beam ◽  
Ion Trap ◽  
Ion Beam ◽  
Electron Beam Ion Trap

Production of noble gas ion beams in a focused ion beam machine using an electron beam ion trap

2007 ◽  
Vol 25 (6) ◽  
pp. 2162 ◽  
Author(s):  
Falk Ullmann ◽  
Frank Grossmann ◽  
Vladimir P. Ovsyannikov ◽  
Jacques Gierak ◽  
Eric Bourhis ◽  
...  
Keyword(s):  
Electron Beam ◽  
Focused Ion Beam ◽  
Ion Trap ◽  
Noble Gas ◽  
Ion Beam ◽  
Ion Beams ◽  
Electron Beam Ion Trap

Fin Level Defect Isolation Inside a FinFET Using Electron Beam Alteration of Current Flow

2017 ◽  
Author(s):  
H.J. Ryu ◽  
A.B. Shah ◽  
Y. Wang ◽  
W.-H. Chuang ◽  
T. Tong
Keyword(s):  
Electron Microscopy ◽  
Electron Beam ◽  
Focused Ion Beam ◽  
Current Flow ◽  
Ion Beam ◽  
The Body ◽  
Complete Understanding ◽  
Root Cause ◽  
Transmission Electron ◽  
Defect Isolation

Abstract When failure analysis is performed on a circuit composed of FinFETs, the degree of defect isolation, in some cases, requires isolation to the fin level inside the problematic FinFET for complete understanding of root cause. This work shows successful application of electron beam alteration of current flow combined with nanoprobing for precise isolation of a defect down to fin level. To understand the mechanism of the leakage, transmission electron microscopy (TEM) slice was made along the leaky drain contact (perpendicular to fin direction) by focused ion beam thinning and lift-out. TEM image shows contact and fin. Stacking fault was found in the body of the silicon fin highlighted by the technique described in this paper.

Carbon Coating for Electron Beam Testing and Focus Ion Beam Reconfiguration

1996 ◽  
Author(s):  
P. Perdu ◽  
G. Perez ◽  
M. Dupire ◽  
B. Benteo
Keyword(s):  
Electron Beam ◽  
Sample Preparation ◽  
Carbon Coating ◽  
Focused Ion Beam ◽  
Sacrificial Layer ◽  
Ion Beam ◽  
Electrical Characterization ◽  
Fault Analysis ◽  
Voltage Contrast ◽  
The Right

Abstract To debug ASIC we likely use accurate tools such as an electron beam tester (Ebeam tester) and a Focused Ion Beam (FIB). Interactions between ions or electrons and the target device build charge up on its upper glassivation layer. This charge up could trigger several problems. With Ebeam testing, it sharply decreases voltage contrast during Image Fault Analysis and hide static voltage contrast. During ASIC reconfiguration with FIB, it could induce damages in the glassivation layer. Sample preparation is getting a key issue and we show how we can deal with it by optimizing carbon coating of the devices. Coating is done by an evaporator. For focused ion beam reconfiguration, we need a very thick coating. Otherwise the coating could be sputtered away due to imaging. This coating is use either to avoid charge-up on glassivated devices or as a sacrificial layer to avoid short circuits on unglassivated devices. For electron beam Testing, we need a very thin coating, we are now using an electrical characterization method with an insitu control system to obtain the right thin thickness. Carbon coating is a very cheap and useful method for sample preparation. It needs to be tuned according to the tool used.

Forbidden Transitions in the Visible Spectra of an Electron Beam Ion Trap (EBIT)

1998 ◽  
Vol 58 (6) ◽  
pp. 599-604 ◽  
Author(s):  
E Träbert ◽  
P Beiersdorfer ◽  
S B Utter ◽  
J R Crespo López-Urrutia
Keyword(s):  
Electron Beam ◽  
Ion Trap ◽  
Electron Beam Ion Trap ◽  
Visible Spectra ◽  
Forbidden Transitions

Soft-X-ray spectra of highly charged Au ions in an electron-beam ion trap

2001 ◽  
Vol 79 (2-3) ◽  
pp. 153-162 ◽  
Author(s):  
E Träbert ◽  
P Beiersdorfer ◽  
K B Fournier ◽  
S B Utter ◽  
K L Wong
Keyword(s):  
Electron Beam ◽  
Beam Energy ◽  
Large Scale ◽  
Ion Trap ◽  
Electron Beam Energy ◽  
X Ray ◽  
Maximum Charge ◽  
Electron Beam Ion Trap ◽  
Atomic Structure Calculations ◽  
Structure Calculations

Systematic variation of the electron-beam energy in an electron-beam ion trap has been employed to produce soft-X-ray spectra (20 to 60 Å) of Au with well-defined maximum charge states ranging from Br- to Co-like ions. Guided by large-scale relativistic atomic structure calculations, the strongest Δn = 0 (n = 4 to n' = 4) transitions in Rb- to Cu-like ions (Au42+ – Au50+) have been identified. PACS Nos.: 32.30Rj, 39.30+w, 31.50+w, 32.20R

Measurements of Temperature Dynamics of Ions Trapped Inside an Electron Beam Ion Trap and Evidence for Ionisation Heating

2001 ◽  
Vol T92 (1) ◽  
pp. 147-149 ◽  
Author(s):  
F. J. Currell ◽  
F. J. Currell ◽  
H. Kuramoto ◽  
S. Ohtani ◽  
C. Scullion ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ion Trap ◽  
Electron Beam Ion Trap ◽  
Temperature Dynamics
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