Reduction of the residual compressive stress of tetrahedral amorphous carbon film by Ar background gas during the filtered vacuum arc process

2007 ◽  
Vol 101 (2) ◽  
pp. 023504 ◽  
Author(s):  
Tae-Young Kim ◽  
Churl Seung Lee ◽  
Young Jin Lee ◽  
Kwang-Ryeol Lee ◽  
Keun-Hwa Chae ◽  
...  
Keyword(s):  
Compressive Stress ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Residual Compressive Stress ◽  
Vacuum Arc ◽  
Amorphous Carbon Film ◽  
Tetrahedral Amorphous Carbon ◽  
Background Gas

Growth of tetrahedral amorphous carbon film: Tight-binding molecular dynamics study

Carbon ◽  
2005 ◽  
Vol 43 (9) ◽  
pp. 1976-1983 ◽  
Author(s):  
B. Zheng ◽  
W.T. Zheng ◽  
S.S. Yu ◽  
H.W. Tian ◽  
F.L. Meng ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Tight Binding ◽  
Amorphous Carbon Film ◽  
Tetrahedral Amorphous Carbon
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