Ion behaviour in pulsed plasma regime by means of Time-resolved energy mass spectroscopy (TREMS) applied to an industrial radiofrequency Plasma Immersion Ion Implanter PULSION®
1973 ◽
Vol 5
(5)
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pp. 721-732
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Keyword(s):
2002 ◽
Vol 35
(16)
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pp. 1939-1945
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Keyword(s):
2011 ◽
Vol 50
(8S1)
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pp. 08JB04
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