In situ observation of the grain growth of the copper electrodeposits for ultralarge scale integration

2006 ◽  
Vol 89 (16) ◽  
pp. 161924 ◽  
Author(s):  
Hyo-Jong Lee ◽  
Heung Nam Han ◽  
Do Hyun Kim ◽  
Ui-hyoung Lee ◽  
Kyu Hwan Oh ◽  
...  
Keyword(s):  
Grain Growth ◽  
In Situ Observation ◽  
Scale Integration

Substrates with Programmable Heater Arrays for In-Situ Observation of Microstructural Evolution of Polycrystalline Films: Towards Real Time Control of Grain Growth

MRS Advances ◽  
2016 ◽  
Vol 1 (26) ◽  
pp. 1947-1952 ◽  
Author(s):  
Prabhu Balasubramanian ◽  
Chengjian Zheng ◽  
Yixuan Tan ◽  
Genevieve Kane ◽  
Antoinette Maniatty ◽  
...  
Keyword(s):  
Grain Growth ◽  
Microstructural Evolution ◽  
Control Strategies ◽  
Experimental Simulation ◽  
In Situ Observation ◽  
Temperature Profiles ◽  
Theory Approach ◽  
Polycrystalline Films ◽  
Real Time Control

ABSTRACTAn integrated experimental – simulation – control theory approach designed to enable adaptive control of microstructural evolution in polycrystalline metals is described. A micro-heater array, containing ten addressable channels, is used to create desired temperature profiles across thin polycrystalline films in situ to a scanning electron microscope (SEM). The goal is that on heating with controlled temperature profiles, the evolution of grain growth within the film can be continuously monitored and compared to Monte Carlo simulations of trajectories towards a desired microstructure. Feed-forward and feedback control strategies are then used to guide the microstructure along the desired trajectory.

Texture Evolution in Cu Films and Lines

2007 ◽  
Vol 990 ◽  
Author(s):  
Chia-Jeng Chung ◽  
David Field ◽  
No-Jin Park ◽  
Christy Woo
Keyword(s):  
Grain Growth ◽  
Strain Energy ◽  
Texture Evolution ◽  
Growth Conditions ◽  
Geometric Constraints ◽  
In Situ Observation ◽  
Processing Conditions ◽  
Cu Films ◽  
Unique Character

ABSTRACTGrain growth in polycrystalline films is controlled by the energetics of the surface, interface and grain boundaries as well as strain energy. The unique character of damascene lines fabricated from electroplated Cu films introduces the additional considerations of bath chemistry and geometric constraints. The moderate stacking fault energy of Cu allows for the development of a substantial twin fraction for certain growth conditions. This paper discusses in-situ observation of grain growth in Cu films and lines under various processing conditions. It is shown that for thicker films and for structures constrained within damascene trenches the energetics of twin boundary formation play a large role in texture development of these structures.

In situ observation of twin-assisted grain growth in nanometer-scaled metal

Micron ◽  
2020 ◽  
Vol 131 ◽  
pp. 102825
Author(s):  
Suyun He ◽  
Chunyang Wang ◽  
Lu Qi ◽  
Hengqiang Ye ◽  
Kui Du
Keyword(s):  
Grain Growth ◽  
In Situ Observation

In Situ Observation of Grain Growth and Recrystallization of Steel at High Temperature

2010 ◽  
Vol 638-642 ◽  
pp. 1077-1082 ◽  
Author(s):  
Yasuhiro Yogo ◽  
Kouji Tanaka ◽  
Koukichi Nakanishi
Keyword(s):  
Grain Size ◽  
High Temperature ◽  
Grain Growth ◽  
In Situ Observation ◽  
Initial Structure ◽  
Grain Sizes ◽  
Dynamic Observation ◽  
Average Grain Size ◽  
Observation Method

An in-situ observation method for structures at high temperature is developed. The new observation device can reveal grain boundaries at high temperature and enables dynamic observation of these boundaries. Grain growth while maintaining microstructure at high temperature is observed by the new observation device with only one specimen for the entire observation, and grain sizes are quantified. The quantifying process reveals two advantages particular to the use of the new observation device: (1) the ability to quantify grain sizes of specified sizes and (2) the results of average grain size for many grains have significantly less errors because the initial structure is the same for the entire observation and the quantifying process. The new observation device has the function to deform a specimen while observing structures at high temperature, so that enables it to observe dynamic recrystallization of steel. The possibility to observe recrystallization is also shown.

In-situ observation of abnormal grain growth in a low-alloyed carbon steel using SEM-EBSD

Materialia ◽  
2021 ◽  
Vol 15 ◽  
pp. 100985
Author(s):  
Genki Saito ◽  
Tianglong Zhang ◽  
Norihito Sakaguchi ◽  
Munekazu Ohno ◽  
Kiyotaka Matsuura ◽  
...  
Keyword(s):  
Carbon Steel ◽  
Grain Growth ◽  
Abnormal Grain Growth ◽  
In Situ Observation

In-situ Observation of the Formation and Growth of Twin in the Copper Electrodeposits for Ultra Large Scale Integration

2006 ◽  
Vol 914 ◽  
Author(s):  
Heung Nam Han ◽  
Hyo-Jong Lee ◽  
Do Hyun Kim ◽  
Ui-hyoung Lee ◽  
Pil-Ryung Cha ◽  
...  
Keyword(s):  
Large Scale ◽  
Electron Backscatter Diffraction ◽  
Front Surface ◽  
Growth Front ◽  
Film Structure ◽  
The Self ◽  
Copper Metallization ◽  
In Situ Observation ◽  
Scale Integration

AbstractDuring the self-annealing in the copper electrodeposits for the copper metallization, an in-situ observation of grain growth of the copper at room temperature was performed by using EBSD (electron backscatter diffraction). The thin film structure of the copper electrodeposits after annealing was columnar. New twin was initiated at the front surface of growing twin and grew along the normal direction of the twin boundary between the new and parent twins. It was confirmed that the annealing twin in the copper electrodeposits during the self-annealing have an {111} growth front surface.

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