Transmission electron microscopy investigation of the structural damage formed in GaN by medium range energy rare earth ion implantation

2006 ◽  
Vol 100 (7) ◽  
pp. 073520 ◽  
Author(s):  
F. Gloux ◽  
T. Wojtowicz ◽  
P. Ruterana ◽  
K. Lorenz ◽  
E. Alves
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Rare Earth ◽  
Structural Damage ◽  
Transmission Electron Microscopy Investigation ◽  
Rare Earth Ion ◽  
Transmission Electron ◽  
Microscopy Investigation ◽  
Electron Microscopy Investigation ◽  
Medium Range
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