scholarly journals Formation of SrTiO3 nanocrystals in amorphous Lu2O3 high-k gate dielectric for floating gate memory application

2006 ◽  
Vol 89 (4) ◽  
pp. 043104 ◽  
Author(s):  
C. L. Yuan ◽  
P. Darmawan ◽  
Y. Setiawan ◽  
P. S. Lee ◽  
J. Ma
Keyword(s):  
Gate Dielectric ◽  
Floating Gate ◽  
High K ◽  
Floating Gate Memory ◽  
High K Gate Dielectric

Experimental observations of the thermal stability of high-k gate dielectric materials on silicon

2002 ◽  
Vol 303 (1) ◽  
pp. 54-63 ◽  
Author(s):  
P.S. Lysaght ◽  
P.J. Chen ◽  
R. Bergmann ◽  
T. Messina ◽  
R.W. Murto ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Gate Dielectric ◽  
Dielectric Materials ◽  
High K ◽  
Thermal Stability Of ◽  
High K Gate Dielectric
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