Mapping substrate/film adhesion with contact-resonance-frequency atomic force microscopy

2006 ◽  
Vol 89 (2) ◽  
pp. 021911 ◽  
Author(s):  
D. C. Hurley ◽  
M. Kopycinska-Müller ◽  
E. D. Langlois ◽  
A. B. Kos ◽  
N. Barbosa
Keyword(s):  
Atomic Force Microscopy ◽  
Resonance Frequency ◽  
Force Microscopy ◽  
Atomic Force ◽  
Film Adhesion ◽  
Substrate Film ◽  
Contact Resonance

scholarly journals Frequency, amplitude, and phase measurements in contact resonance atomic force microscopies

2014 ◽  
Vol 5 ◽  
pp. 278-288 ◽  
Author(s):  
Gheorghe Stan ◽  
Santiago D Solares
Keyword(s):  
Atomic Force Microscopy ◽  
Resonance Frequency ◽  
Phase Locked Loop ◽  
Phase Response ◽  
Phase Measurements ◽  
Force Microscopy ◽  
Atomic Force ◽  
Loop Detection ◽  
Similarities And Differences ◽  
Contact Resonance

The resonance frequency, amplitude, and phase response of the first two eigenmodes of two contact-resonance atomic force microscopy (CR-AFM) configurations, which differ in the method used to excite the system (cantilever base vs sample excitation), are analyzed in this work. Similarities and differences in the observables of the cantilever dynamics, as well as the different effect of the tip–sample contact properties on those observables in each configuration are discussed. Finally, the expected accuracy of CR-AFM using phase-locked loop detection is investigated and quantification of the typical errors incurred during measurements is provided.

scholarly journals An ultrafast piezoelectric Z-scanner with a resonance frequency above 1.1 MHz for high-speed atomic force microscopy

2022 ◽  
Vol 93 (1) ◽  
pp. 013701
Author(s):  
Masahiro Shimizu ◽  
Chihiro Okamoto ◽  
Kenichi Umeda ◽  
Shinji Watanabe ◽  
Toshio Ando ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Resonance Frequency ◽  
High Speed ◽  
Force Microscopy ◽  
Atomic Force

Stick-to-sliding transition in contact-resonance atomic force microscopy

2018 ◽  
Vol 113 (8) ◽  
pp. 083102
Author(s):  
C. Ma ◽  
V. Pfahl ◽  
Z. Wang ◽  
Y. Chen ◽  
J. Chu ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Contact Resonance

Plate geometries for contact resonance atomic force microscopy: Modeling, optimization, and verification

2018 ◽  
Vol 124 (1) ◽  
pp. 014503 ◽  
Author(s):  
Matteo Aureli ◽  
Syed N. Ahsan ◽  
Rafiul H. Shihab ◽  
Ryan C. Tung
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Contact Resonance

scholarly journals Scanning speed phenomenon in contact-resonance atomic force microscopy

2018 ◽  
Vol 9 ◽  
pp. 945-952 ◽  
Author(s):  
Christopher C Glover ◽  
Jason P Killgore ◽  
Ryan C Tung
Keyword(s):  
Atomic Force Microscopy ◽  
Hydrodynamic Theory ◽  
Squeeze Film ◽  
Resonance Spectroscopy ◽  
Related Phenomenon ◽  
Contact Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
Scan Speed ◽  
Contact Resonance

This work presents data confirming the existence of a scan speed related phenomenon in contact-mode atomic force microscopy (AFM). Specifically, contact-resonance spectroscopy is used to interrogate this phenomenon. Above a critical scan speed, a monotonic decrease in the recorded contact-resonance frequency is observed with increasing scan speed. Proper characterization and understanding of this phenomenon is necessary to conduct accurate quantitative imaging using contact-resonance AFM, and other contact-mode AFM techniques, at higher scan speeds. A squeeze film hydrodynamic theory is proposed to explain this phenomenon, and model predictions are compared against the experimental data.

A Plate-Like Sensor for the Identification of Sample Viscoelastic Properties Using Contact Resonance Atomic Force Microscopy

2021 ◽  
pp. 1-9
Author(s):  
Matteo Aureli ◽  
Ryan Tung
Keyword(s):  
Atomic Force Microscopy ◽  
Viscoelastic Properties ◽  
Ritz Method ◽  
Theoretical Derivation ◽  
Force Microscopy ◽  
Atomic Force ◽  
Modal Damping ◽  
Stiffness And Damping ◽  
Data Estimation ◽  
Contact Resonance

Abstract In this paper, we present a new contact resonance atomic force microscopy based method utilizing a square, plate-like microsensor to accurately estimate viscoelastic sample properties. A theoretical derivation, based on Rayleigh-Ritz method and on an “unconventional” generalized eigenvalue problem, is presented and a numerical experiment is devised to verify the method. We present an updated sensitivity criterion that allows users, given a set of measured in-contact eigenfrequencies and modal damping ratios, to select the best eigenfrequency for accurate data estimation. The verification results are then presented and discussed. Results show that the proposed method performs extremely well in the identification of viscoelastic properties over broad ranges of non-dimensional sample stiffness and damping values.

scholarly journals Subsurface imaging of flexible circuits via contact resonance atomic force microscopy

2019 ◽  
Vol 10 ◽  
pp. 1636-1647 ◽  
Author(s):  
Wenting Wang ◽  
Chengfu Ma ◽  
Yuhang Chen ◽  
Lei Zheng ◽  
Huarong Liu ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Theoretical Calculations ◽  
Contact Stiffness ◽  
Metal Layer ◽  
Experimental Results ◽  
Subsurface Imaging ◽  
Force Microscopy ◽  
Atomic Force ◽  
Cover Thickness ◽  
Contact Resonance

Subsurface imaging of Au circuit structures embedded in poly(methyl methacrylate) (PMMA) thin films with a cover thickness ranging from 52 to 653 nm was carried out by using contact resonance atomic force microscopy (CR-AFM). The mechanical difference of the embedded metal layer leads to an obvious CR-AFM frequency shift and therefore its unambiguous differentiation from the polymer matrix. The contact stiffness contrast, determined from the tracked frequency images, was employed for quantitative evaluation. The influence of various parameter settings and sample properties was systematically investigated by combining experimental results with theoretical analysis from finite element simulations. The results show that imaging with a softer cantilever and a lower eigenmode will improve the subsurface contrast. The experimental results and theoretical calculations provide a guide to optimizing parameter settings for the nondestructive diagnosis of flexible circuits. Defect detection of the embedded circuit pattern was also carried out, which indicates the capability of imaging tiny subsurface structures smaller than 100 nm by using CR-AFM.

Measurement of undercut etching by contact resonance atomic force microscopy

2020 ◽  
Vol 117 (2) ◽  
pp. 023103
Author(s):  
Wenting Wang ◽  
Chengfu Ma ◽  
Yuhang Chen
Keyword(s):  
Atomic Force Microscopy ◽  
Force Microscopy ◽  
Atomic Force ◽  
Contact Resonance
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