scholarly journals Ultrasensitive mass sensing using mode localization in coupled microcantilevers

2006 ◽  
Vol 88 (25) ◽  
pp. 254102 ◽  
Author(s):  
Matthew Spletzer ◽  
Arvind Raman ◽  
Alexander Q. Wu ◽  
Xianfan Xu ◽  
Ron Reifenberger
Keyword(s):  
Mass Sensing ◽  
Mode Localization

Mode Localization in Two Coupled Nearly Identical MEMS Cantilevers for Mass Sensing

2019 ◽  
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  
Keyword(s):  
Amplitude Ratio ◽  
Actuation Voltage ◽  
Beam Theory ◽  
Mass Detection ◽  
Mass Sensing ◽  
Experimental Frequency ◽  
Mode Localization ◽  
Dc Voltage ◽  
Geometrical Imperfections ◽  
Mems Cantilevers

Abstract This paper investigates the mass sensing in a mode-localized sensor composed of two weakly coupled MEMS cantilevers with lengths 98μm and 100μm. The two resonators are connected by a coupling beam near the fixed end, and the shortest cantilever is electrostatically actuated with a combined AC-DC voltage. The DC actuation voltage is tuned to compensate the length difference and geometrical imperfections in order to dynamically equilibrate the system. An analytical model of the device using the Euler Bernoulli beam theory is presented and the required DC voltage to reach the balanced state is used. A mass perturbation is then added on the long cantilever and the eigenstate shifts and amplitude ratios in each mode are calculated for different couplings. Results show that the amplitude ratio of the second mode is the best output metric for the mass detection. For the validation of the model, an experimental investigation is carried out by using devices fabricated with the Multi-User MEMS Processes. Three different couplings are considered and the long cantilever is designed with a mass attached at its end. Instead of adding a mass on the device, we remove this part with a probe to introduce the perturbation. When the mass is removed, the experimental frequency responses of the device show localized vibrations, which are in good agreement with the theoretical results.

A Novel Thermal Piezoresistive Coupled Resonator Implementing Mode Localization for Mass Sensing

2020 ◽  
Author(s):  
Shashwat Bhattacharya ◽  
Jyoti Satija ◽  
Shyam Trivedi ◽  
Sheng-Shian Li
Keyword(s):  
Mass Sensing ◽  
Mode Localization ◽  
Coupled Resonator

scholarly journals Mode Localization and Eigenfrequency Curve Veerings of Two Overhanged Beams

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 324
Author(s):  
Yin Zhang ◽  
Yuri Petrov ◽  
Ya-pu Zhao
Keyword(s):  
Mechanical Properties ◽  
Complex Dynamics ◽  
Computational Results ◽  
Mass Sensing ◽  
Mode Localization ◽  
Mode Splitting ◽  
Variation Patterns ◽  
Numerical Discretization ◽  
Discretization Procedure

Overhang provides a simple but effective way of coupling (sub)structures, which has been widely adopted in the applications of optomechanics, electromechanics, mass sensing resonators, etc. Despite its simplicity, an overhanging structure demonstrates rich and complex dynamics such as mode splitting, localization and eigenfrequency veering. When an eigenfrequency veering occurs, two eigenfrequencies are very close to each other, and the error associated with the numerical discretization procedure can lead to wrong and unphysical computational results. A method of computing the eigenfrequency of two overhanging beams, which involves no numerical discretization procedure, is analytically derived. Based on the method, the mode localization and eigenfrequency veering of the overhanging beams are systematically studied and their variation patterns are summarized. The effects of the overhang geometry and beam mechanical properties on the eigenfrequency veering are also identified.

scholarly journals Estimation bounds of beat signal in the R-Mode localization system

IEEE Access ◽  
2021 ◽  
pp. 1-1
Author(s):  
Lars Grundhofer ◽  
Stefan Gewies ◽  
Giovanni Del Galdo
Keyword(s):  
Beat Signal ◽  
Mode Localization ◽  
Localization System

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

scholarly journals Nanomechanical Molecular Mass Sensing Using Suspended Microchannel Resonators

Sensors ◽  
2021 ◽  
Vol 21 (10) ◽  
pp. 3337
Author(s):  
Alberto Martín-Pérez ◽  
Daniel Ramos ◽  
Javier Tamayo ◽  
Montserrat Calleja
Keyword(s):  
Molecular Mass ◽  
Mass Density ◽  
Applied Pressure ◽  
Atomic Mass ◽  
Liquid Sample ◽  
Mass Sensing ◽  
Average Molecular Mass ◽  
Fluid Properties ◽  
Molecular Masses ◽  
Microchannel Resonators

In this work we study the different phenomena taking place when a hydrostatic pressure is applied in the inner fluid of a suspended microchannel resonator. Additionally to pressure-induced stiffness terms, we have theoretically predicted and experimentally demonstrated that the pressure also induces mass effects which depend on both the applied pressure and the fluid properties. We have used these phenomena to characterize the frequency response of the device as a function of the fluid compressibility and molecular masses of different fluids ranging from liquids to gases. The proposed device in this work can measure the mass density of an unknown liquid sample with a resolution of 0.7 µg/mL and perform gas mixtures characterization by measuring its average molecular mass with a resolution of 0.01 atomic mass units.

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