In situ stress measurements in zirconium and zirconium oxide films prepared by direct current sputtering

2006 ◽  
Vol 99 (12) ◽  
pp. 123517 ◽  
Author(s):  
Robert J. Drese ◽  
Matthias Wuttig
2017 ◽  
Vol 220 ◽  
pp. 76-84 ◽  
Author(s):  
Jianju Du ◽  
Xianghui Qin ◽  
Qingli Zeng ◽  
Luqing Zhang ◽  
Qunce Chen ◽  
...  

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