Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy

2006 ◽  
Vol 88 (15) ◽  
pp. 151502 ◽  
Author(s):  
Jean-Paul Booth ◽  
Cormac S. Corr ◽  
Garrett A. Curley ◽  
Jacques Jolly ◽  
Jean Guillon ◽  
...  
Keyword(s):  
Density Measurement ◽  
Negative Ion ◽  
Dual Frequency ◽  
Plasma Etch ◽  
Cavity Ring Down Spectroscopy ◽  
Ion Density ◽  
Cavity Ring Down

Cavity ring-down spectroscopy to measure negative ion density in a helicon plasma source for fusion neutral beams

2018 ◽  
Vol 89 (10) ◽  
pp. 103504 ◽  
Author(s):  
R. Agnello ◽  
M. Barbisan ◽  
I. Furno ◽  
Ph. Guittienne ◽  
A. A. Howling ◽  
...  
Keyword(s):  
Plasma Source ◽  
Negative Ion ◽  
Cavity Ring Down Spectroscopy ◽  
Helicon Plasma ◽  
Ion Density ◽  
Neutral Beams ◽  
Cavity Ring Down

Development and first operation of a cavity ring down spectroscopy diagnostic in the negative ion source SPIDER

2021 ◽  
Vol 92 (5) ◽  
pp. 053507
Author(s):  
M. Barbisan ◽  
R. Pasqualotto ◽  
R. Agnello ◽  
M. Pilieci ◽  
G. Serianni ◽  
...  
Keyword(s):  
Ion Source ◽  
Negative Ion ◽  
Cavity Ring Down Spectroscopy ◽  
Cavity Ring Down

Hydrogen negative ion density measurement by laser photodetachment and the effect of H recombination on the walls

2021 ◽  
Vol 28 (2) ◽  
pp. 023505
Author(s):  
Min Park ◽  
Byungkeun Na ◽  
Jong-Gu Kwak ◽  
Tae-seong Kim ◽  
Bongki Jung ◽  
...  
Keyword(s):  
Density Measurement ◽  
Negative Ion ◽  
Ion Density

Cavity Ring-Down System for Density Measurement of Negative Hydrogen Ion on Negative Ion Source

2011 ◽  
Author(s):  
Haruhisa Nakano ◽  
Katsuyoshi Tsumori ◽  
Kenichi Nagaoka ◽  
Masayuki Shibuya ◽  
Ursel Fantz ◽  
...  
Keyword(s):  
Density Measurement ◽  
Ion Source ◽  
Hydrogen Ion ◽  
Negative Ion ◽  
Negative Hydrogen Ion ◽  
Cavity Ring Down
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