Efficiency of silicon micromachining by femtosecond laser pulses in ambient air

2006 ◽  
Vol 99 (8) ◽  
pp. 083101 ◽  
Author(s):  
David J. Hwang ◽  
Costas P. Grigoropoulos ◽  
Tae Y. Choi
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Ambient Air ◽  
Femtosecond Laser Pulses ◽  
Silicon Micromachining

Study of ambient air ionization with femtosecond laser pulses

2005 ◽  
Author(s):  
Yi Wang ◽  
Xiaolei Wang ◽  
Nan Zhang ◽  
Hongchen Zhai ◽  
Xiaonong Zhu
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Ambient Air ◽  
Femtosecond Laser Pulses ◽  
Air Ionization

scholarly journals Femtosecond laser ablation of brass: A study of surface morphology and ablation rate

2012 ◽  
Vol 30 (3) ◽  
pp. 473-479 ◽  
Author(s):  
Mohamed E. Shaheen ◽  
Brian J. Fryer
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Surface Morphology ◽  
Fine Particles ◽  
Femtosecond Laser Ablation ◽  
Laser Pulses ◽  
Ambient Air ◽  
Ablation Rate ◽  
Femtosecond Laser Pulses ◽  
Nanosecond Laser

AbstractThe interaction of near infrared femtosecond laser pulses with a Cu based alloy (brass) in ambient air at atmospheric pressure and under different laser conditions was investigated. The effects of laser fluence and number of pulses on surface morphology and ablation rate were studied using scanning electron microscopy (SEM) and optical microscopy. Ablation rates were found to rapidly increase from 83 to 604 nm/pulse in the fluence range 1.14–12.21 J/cm2. At fluence >12.21 J/cm2, ablation rates increased slowly to a maximum (607 nm/pulse at 19.14 J/cm2), and then decreased at fluence higher than 20.47 J/cm2 to 564 nm/pulse at 24.89 J/cm2. Large amounts of ablated material in a form of agglomerated fine particles were observed around the ablation craters as the number of laser pulses and fluence increased. The study of surface morphology shows reduced thermal effects with femtosecond laser ablation in comparison to nanosecond laser ablation at low fluence.

Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Sol Gel ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Hybrid Polymer ◽  
Organic Hybrid ◽  
Two Photon ◽  
Applied Technology ◽  
Scale Structures ◽  
Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

Ablation of metals with femtosecond laser pulses

2001 ◽  
Author(s):  
K. H. Leong ◽  
T. Y. Plew ◽  
R. L. Maynard ◽  
A. A. Said ◽  
L. A. Walker
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Picosecond Single-Photon and Femtosecond Two-Photon Pulsed Laser Stimulation for IC Characterization and Failure Analysis

2009 ◽  
Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Single Photon ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Ultrashort Laser Pulses ◽  
Laser Stimulation ◽  
Two Photon ◽  
Resolution Improvement ◽  
Ultrashort Laser

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.

Storing energy in lithium fluoride crystals irradiated with femtosecond laser pulses

2016 ◽  
Vol 80 (1) ◽  
pp. 85-88 ◽  
Author(s):  
V. P. Dresvyanskiy ◽  
M. A. Moiseeva ◽  
A. V. Kuznetsov ◽  
D. S. Glazunov ◽  
B. Chadraa ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Lithium Fluoride ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Fluoride Crystals

scholarly journals Regulating disordered plasmonic nanoparticles into polarization sensitive metasurfaces

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Shulei Li ◽  
Mingcheng Panmai ◽  
Shaolong Tie ◽  
Yi Xu ◽  
Jin Xiang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Spatial Resolution ◽  
Metallic Nanoparticles ◽  
Near Infrared ◽  
Optical Memory ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Optical Diffraction ◽  
Plasmonic Nanoparticles ◽  
Direct Laser

Abstract Metasurfaces composed of regularly arranged and deliberately oriented metallic nanoparticles can be employed to manipulate the amplitude, phase and polarization of an incident electromagnetic wave. The metasurfaces operating in the visible to near infrared spectral range rely on the modern fabrication technologies which offer a spatial resolution beyond the optical diffraction limit. Although direct laser writing is an alternative to the fabrication of nanostructures, the achievement of regular nanostructures with deep-subwavelength periods by using this method remains a big challenge. Here, we proposed and demonstrated a novel strategy for regulating disordered plasmonic nanoparticles into nanogratings with deep-subwavelength periods and reshaped nanoparticles by using femtosecond laser pulses. The orientations of the nanogratings depend strongly on the polarization of the femtosecond laser light. Such nanogratings exhibit reflection and polarization control over the reflected light, enabling the realization of polarization sensitive optical memory and color display with high spatial resolution and good chromacity.

Sign in / Sign up

Export Citation Format

Share Document