Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films

2006 ◽  
Vol 88 (14) ◽  
pp. 143119 ◽  
Author(s):  
Shinichi Igarashi ◽  
Akiko N. Itakura ◽  
Masahiro Kitajima ◽  
Anye N. Chifen ◽  
Renate Förch ◽  
...  
Keyword(s):  
Thin Films ◽  
Ultraviolet Light ◽  
Surface Stress ◽  
Light Irradiation ◽  
Stress Control ◽  
Ultraviolet Light Irradiation

Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation

2021 ◽  
Vol 3 (3) ◽  
pp. 1244-1251
Author(s):  
Hyunjin Joh ◽  
Gopinathan Anoop ◽  
Won-June Lee ◽  
Dipjyoti Das ◽  
Jun Young Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Ultraviolet Light ◽  
Light Irradiation ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Ultraviolet Light Irradiation ◽  
Deep Ultraviolet

Influence of thermal annealing and ultraviolet light irradiation on LaF_3 thin films at 193 nm

2005 ◽  
Vol 44 (32) ◽  
pp. 6921 ◽  
Author(s):  
Cheng-Chung Lee ◽  
Ming-Chung Liu ◽  
Masaaki Kaneko ◽  
Kazuhide Nakahira ◽  
Yuuichi Takano
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Ultraviolet Light ◽  
Light Irradiation ◽  
Ultraviolet Light Irradiation ◽  
193 Nm

Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films

2014 ◽  
Vol 29 (9) ◽  
pp. 941
Author(s):  
JIANG Jin-Long ◽  
WANG Qiong ◽  
HUANG Hao ◽  
ZHANG Xia ◽  
WANG Yu-Bao ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Microstructure Evolution ◽  
Carbon Films ◽  
Light Irradiation ◽  
Diamond Like Carbon ◽  
Ultraviolet Light Irradiation

Effects of Atmosphere and Ultraviolet Light Irradiation on Chemical Mechanical Polishing Characteristics of SiC Wafers

2012 ◽  
Vol 51 ◽  
pp. 05EF05 ◽  
Author(s):  
Osamu Ohnishi ◽  
Toshiro Doi ◽  
Syuhei Kurokawa ◽  
Tsutomu Yamazaki ◽  
Michio Uneda ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Light Irradiation ◽  
Ultraviolet Light Irradiation

scholarly journals Virus Inactivation in Superoxide Dismutase Preparations by Ultraviolet Light Irradiation.

1998 ◽  
Vol 21 (6) ◽  
pp. 621-623 ◽  
Author(s):  
Junichi HIRAYAMA ◽  
Hideki ABE ◽  
Kenji IKEBUCHI ◽  
Motohiro HORIUCHI ◽  
Morikazu SHINAGAWA ◽  
...  
Keyword(s):  
Superoxide Dismutase ◽  
Ultraviolet Light ◽  
Light Irradiation ◽  
Virus Inactivation ◽  
Ultraviolet Light Irradiation
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