Investigation of a rf inductively coupled plasma ion source capable of highly uniform and collimated ion-beam generation

2006 ◽  
Vol 77 (3) ◽  
pp. 03B515 ◽  
Author(s):  
V. Kanarov ◽  
A. Hayes ◽  
R. Yevtukhov ◽  
I. Kameyama ◽  
D. Siegfried ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Ion Beam ◽  
Ion Source ◽  
Beam Generation ◽  
Inductively Coupled ◽  
Plasma Ion Source ◽  
Highly Uniform

High Current Focused Ion Beam Instrument for Destructive Physical Analysis Applications

2008 ◽  
Author(s):  
Paul Tesch ◽  
Noel Smith ◽  
Noel Martin ◽  
Doug Kinion
Keyword(s):  
Cross Sections ◽  
Inductively Coupled Plasma ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Physical Analysis ◽  
Inductively Coupled ◽  
3D Metrology ◽  
Plasma Ion Source

Abstract Conventional focused ion beams (FIB) employing liquid metal ion sources (LMIS) are used to create site specific cross-sections for viewing subsurface features and performing 3D metrology on subsurface structure. Emerging applications incorporate novel materials as well as large structures that interface to decreasing IC dimensions and often require destructive physical analysis. This paper describes a novel instrument in which an inductively coupled plasma ion source is integrated onto a conventional FIB column. It compares this instrument to the existing LMIS FIBs and shows examples that illustrate the capabilities of this tool. This instrument retains the benefits of the conventional LMIS FIB such as high placement accuracy and the ability to immediately obtain high resolution images of the cross-section face without having to transfer it to another tool. It is capable of creating large cross-sections from 10 microns to 1mm in size at about 100 times faster than a conventional FIB.

Laser ablation low-flow ICP-MS for elemental bioimaging

2015 ◽  
Vol 30 (10) ◽  
pp. 2120-2124 ◽  
Author(s):  
Tobias Steingrobe ◽  
Ann-Christin Niehoff ◽  
Bastian Franze ◽  
Diana Lenhard ◽  
Hubertus Pietsch ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Laser Ablation ◽  
Inductively Coupled Plasma ◽  
Rat Kidney ◽  
Ion Source ◽  
Low Flow ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Plasma Ion Source

A laser ablation system (LA) was coupled to an in-house developed low-flow inductively coupled plasma ion source for mass spectrometry (ICP-MS). This new setup was applied to elemental bioimaging of rat kidney sections.

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