scholarly journals Measuring the electron temperature by optical emission spectroscopy in two temperature plasmas at atmospheric pressure: A critical approach

2006 ◽  
Vol 99 (3) ◽  
pp. 033104 ◽  
Author(s):  
A. Yanguas-Gil ◽  
J. Cotrino ◽  
A. R. González-Elipe
Keyword(s):  
Electron Temperature ◽  
Atmospheric Pressure ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Critical Approach ◽  
Two Temperature

scholarly journals Measurement of the electron temperature in dielectric barrier discharge by line-ratio method of optical emission spectroscopy

2015 ◽  
Vol 3 ◽  
pp. 1-6 ◽  
Author(s):  
R.B. Tyata ◽  
D.P. Subedi ◽  
C.S. Wong
Keyword(s):  
Electron Temperature ◽  
Dielectric Barrier Discharge ◽  
Atmospheric Pressure ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Barrier Discharge ◽  
Emission Spectra ◽  
Optical Emission ◽  
Ratio Method ◽  
Dielectric Barrier

In this paper, experimental results of atmospheric pressure dielectric barrier discharge (DBD) produced in air and nitrogen gas have been presented. The discharge was generated using a high voltage (0-20 kV) power supply operating at 10-30 kHz in hemispherical electrodes system with dielectric barrier of glass between the electrodes. Optical emission spectroscopy was used for the characterization of the discharge produced at atmospheric pressure. The emission spectra in the range of 200 nm to 450 nm have been analyzed to estimate the electron temperature by line intensity ratio method. The results show that the electron temperature is about 0.70 eV in air and 0.71 in nitrogen.

scholarly journals Machine Learning Prediction of Electron Density and Temperature from Optical Emission Spectroscopy in Nitrogen Plasma

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song
Keyword(s):  
Machine Learning ◽  
Electron Temperature ◽  
Real Time ◽  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Parameters ◽  
Plasma Nitridation

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.

Parametric evaluation of ambient desorption optical emission spectroscopy utilizing a liquid sampling-atmospheric pressure glow discharge microplasma

2017 ◽  
Vol 32 (5) ◽  
pp. 931-941 ◽  
Author(s):  
Htoo W. Paing ◽  
R. Kenneth Marcus
Keyword(s):  
Glow Discharge ◽  
Atmospheric Pressure ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Atmospheric Pressure Glow Discharge ◽  
Operational Parameters ◽  
Pressure Glow Discharge ◽  
Liquid Sampling

The operational parameters of the AD-LS-APGD-OES microplasma have been evaluated in terms of understanding their roles in analyte response.

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