Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

B. Legrand; A.-S. Rollier; D. Collard; Lionel Buchaillot

doi:10.1063/1.2165282

Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Applied Physics Letters ◽

10.1063/1.2165282 ◽

2006 ◽

Vol 88 (3) ◽

pp. 034105 ◽

Cited By ~ 17

Author(s):

B. Legrand ◽

A.-S. Rollier ◽

D. Collard ◽

Lionel Buchaillot

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators ◽

Dielectric Liquids

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Dielectric liquids for enhanced field force in macro scale direct drive electrostatic actuators and rotating machinery

IEEE Transactions on Dielectrics and Electrical Insulation ◽

10.1109/tdei.2016.7556463 ◽

2016 ◽

Vol 23 (4) ◽

pp. 1924-1934 ◽

Cited By ~ 11

Author(s):

Baoyun Ge ◽

Daniel C. Ludois

Keyword(s):

Rotating Machinery ◽

Direct Drive ◽

Electrostatic Actuators ◽

Field Force ◽

Dielectric Liquids ◽

Macro Scale

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Torque multiplication and stable range tradeoff in parallel plate angular electrostatic actuators with fixed DC bias

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2005.859072 ◽

2005 ◽

Vol 14 (6) ◽

pp. 1217-1222 ◽

Cited By ~ 4

Author(s):

A. Pareek ◽

M.R. Dokmeci ◽

S. Bakshi ◽

C.H. Mastrangelo

Keyword(s):

Parallel Plate ◽

Stable Range ◽

Electrostatic Actuators ◽

Dc Bias

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Parallel Plate Electrostatic Actuators in Liquids: Displacement-Voltage Optimisation for Microfluidic Applications

19th IEEE International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2006.1627900 ◽

2006 ◽

Author(s):

B. Legrand ◽

A.S. Rollier ◽

L. Buchaillot ◽

D. Collard

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators

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Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215328 ◽

2004 ◽

Cited By ~ 9

Author(s):

T.D. Kudrle ◽

G.M. Shedd ◽

C.C. Wang ◽

J.C. Hsiao ◽

M.G. Bancu ◽

...

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators

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Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control

Sensors and Actuators A Physical ◽

10.1016/j.sna.2016.04.002 ◽

2016 ◽

Vol 244 ◽

pp. 174-183 ◽

Cited By ~ 3

Author(s):

Eurico Esteves Moreira ◽

Vasco Lima ◽

Filipe Serra Alves ◽

Jorge Cabral ◽

João Gaspar ◽

...

Keyword(s):

Parallel Plate ◽

Closed Loop ◽

Tracking System ◽

Closed Loop Control ◽

Electrostatic Actuators ◽

Loop Control

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Filter-based control for parallel plate micro electrostatic actuators

2011 International Conference on Communications, Computing and Control Applications (CCCA) ◽

10.1109/ccca.2011.6031405 ◽

2011 ◽

Author(s):

Mohammad H. Salah ◽

Alper Bayrak ◽

Enver Tatlicioglu

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators

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Charge control of parallel-plate, electrostatic actuators and the tip-in instability

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2003.818455 ◽

2003 ◽

Vol 12 (5) ◽

pp. 656-671 ◽

Cited By ~ 160

Author(s):

J.I. Seeger ◽

B.E. Boser

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators ◽

Charge Control

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Position, damping and inertia control of parallel-plate electrostatic actuators

2008 IEEE International Symposium on Circuits and Systems ◽

10.1109/iscas.2008.4541868 ◽

2008 ◽

Author(s):

Daniel Fernandez ◽

Jordi Madrenas ◽

Jordi Cosp

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators ◽

Inertia Control

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Frequency-dependent stability of parallel-plate electrostatic actuators in conductive fluids

Applied Physics Letters ◽

10.1063/1.3389491 ◽

2010 ◽

Vol 96 (20) ◽

pp. 203505 ◽

Cited By ~ 10

Author(s):

T. L. Sounart ◽

H. V. Panchawagh ◽

R. L. Mahajan

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators ◽

Frequency Dependent

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Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators

10.1109/sensor.1995.721820 ◽

2005 ◽

Cited By ~ 3

Author(s):

P.B. Chu ◽

P.R. Nelson ◽

M.L. Tachiki ◽

K.S.J. Pister

Keyword(s):

Parallel Plate ◽

Electrostatic Actuators

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