H− extraction from electron-cyclotron-resonance-driven multicusp volume source operated in pulsed mode

2006 ◽  
Vol 77 (3) ◽  
pp. 03A512 ◽  
Author(s):  
P. Svarnas ◽  
M. Bacal ◽  
P. Auvray ◽  
S. Béchu ◽  
J. Pelletier
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Volume Source ◽  
Pulsed Mode

Determination of Ion Confinement Time in RIKEN 18 GHz Electron Cyclotron Resonance Ion Source (ECRIS) under Pulsed Mode Operation

1996 ◽  
Vol 35 (Part 2, No. 9A) ◽  
pp. L1124-L1126 ◽  
Author(s):  
Takahide Nakagawa ◽  
Yoshitoshi Miyazawa ◽  
Masatake Hemmi ◽  
Toshiya Chiba ◽  
Naohito Inabe ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Confinement Time ◽  
Mode Operation ◽  
Pulsed Mode

H− ion production in electron cyclotron resonance driven multicusp volume source

2004 ◽  
Vol 75 (5) ◽  
pp. 1750-1753 ◽  
Author(s):  
A. A. Ivanov ◽  
C. Rouillé ◽  
M. Bacal ◽  
Y. Arnal ◽  
S. Béchu ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Volume Source ◽  
Ion Production

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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