Fully ultrahigh-vacuum-compatible fabrication of submicrometer-spaced electrical contacts

2006 ◽  
Vol 77 (2) ◽  
pp. 026101 ◽  
Author(s):  
C. Gärtner ◽  
R. Hoffman ◽  
F. Pérez-Willard ◽  
M. Sauter ◽  
C. Sürgers ◽  
...  
Keyword(s):  
Ultrahigh Vacuum ◽  
Electrical Contacts

Erratum: “Fully ultrahigh-vacuum-compatible fabrication of submicrometer-spaced electrical contacts” [Rev. Sci. Instrum. 77, 026101 (2006)]

2006 ◽  
Vol 77 (9) ◽  
pp. 099901 ◽  
Author(s):  
C. Gärtner ◽  
R. Hoffmann ◽  
F. Pérez-Willard ◽  
M. Sauter ◽  
C. Sürgers ◽  
...  
Keyword(s):  
Ultrahigh Vacuum ◽  
Electrical Contacts

TEM characterization of Au/Polysilicon interactions

1990 ◽  
Vol 48 (4) ◽  
pp. 650-651
Author(s):  
N. David Theodore ◽  
Leslie H. Allen ◽  
C. Barry Carter ◽  
James W. Mayer
Keyword(s):  
Solid Phase ◽  
Single Crystal Silicon ◽  
Chemical Vapor ◽  
Electrical Contacts ◽  
Silicon Substrates ◽  
Crystal Silicon ◽  
Transmission Electron ◽  
Polysilicon Films ◽  
The Stability

Metal/polysilicon investigations contribute to an understanding of issues relevant to the stability of electrical contacts in semiconductor devices. These investigations also contribute to an understanding of Si lateral solid-phase epitactic growth. Metals such as Au, Al and Ag form eutectics with Si. reactions in these metal/polysilicon systems lead to the formation of large-grain silicon. Of these systems, the Al/polysilicon system has been most extensively studied. In this study, the behavior upon thermal annealing of Au/polysilicon bilayers is investigated using cross-section transmission electron microscopy (XTEM). The unique feature of this system is that silicon grain-growth occurs at particularly low temperatures ∽300°C).Gold/polysilicon bilayers were fabricated on thermally oxidized single-crystal silicon substrates. Lowpressure chemical vapor deposition (LPCVD) at 620°C was used to obtain 100 to 400 nm polysilicon films. The surface of the polysilicon was cleaned with a buffered hydrofluoric acid solution. Gold was then thermally evaporated onto the samples.

CRM MOLYBDENUM-50 RHENIUM

Alloy Digest ◽  
1970 ◽  
Vol 19 (12) ◽  
Keyword(s):  
Corrosion Resistance ◽  
High Temperature ◽  
Powder Metallurgy ◽  
Melting Point ◽  
Physical Properties ◽  
Heat Treating ◽  
Electrical Contacts ◽  
High Melting ◽  
High Melting Point ◽  
Temperature Performance

Abstract CRM MOLYBDENUM-50 RHENIUM is a high-melting-point alloy for applications such as electronics tube components, electrical contacts, thermionic converters, thermocouples, heating elements and rocket thrusters. All products are produced by powder metallurgy. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties as well as creep. It also includes information on high temperature performance and corrosion resistance as well as forming, heat treating, machining, joining, and surface treatment. Filing Code: Mo-11. Producer or source: Chase Brass & Copper Company Inc..

ANACONDA ALLOY (E) 505

Alloy Digest ◽  
1979 ◽  
Vol 28 (12) ◽  
Keyword(s):  
Electrical Conductivity ◽  
Corrosion Resistance ◽  
Physical Properties ◽  
Tensile Properties ◽  
Heat Treating ◽  
Electrical Contacts ◽  
Good Resistance ◽  
Flexible Metal

Abstract ANACONDA Alloy (E) 505 is a low-tin phosphor bronze with excellent resistance to corrosion, excellent ductility and good resistance to fatigue. It has good thermal and electrical conductivity. Its uses include flexible metal hose, electrical contacts, fuse clips and fasteners. This datasheet provides information on composition, physical properties, elasticity, and tensile properties. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: Cu-385. Producer or source: Anaconda American Brass Company.

CRM RHENIUM

Alloy Digest ◽  
1970 ◽  
Vol 19 (8) ◽  
Keyword(s):  
Corrosion Resistance ◽  
High Temperature ◽  
Powder Metallurgy ◽  
Melting Point ◽  
Heat Treating ◽  
Electrical Contacts ◽  
High Melting ◽  
High Melting Point ◽  
Temperature Performance ◽  
Commercially Pure

Abstract CRM RHENIUM is a commercially pure, high-melting-point metal for applications such as electronics tube components, electrical contacts, thermionic converters, thermocouples, heating elements and rocket thrusters. All products are produced by powder metallurgy. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties as well as creep. It also includes information on high temperature performance and corrosion resistance as well as forming, heat treating, machining, joining, and surface treatment. Filing Code: Re-1. Producer or source: Chase Brass & Copper Company Inc..

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