Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications

2005 ◽  
Vol 87 (24) ◽  
pp. 241503 ◽  
Author(s):  
Shinsuke Fujioka ◽  
Hiroaki Nishimura ◽  
Katsunobu Nishihara ◽  
Masakatsu Murakami ◽  
Youngces-G Kang ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light ◽  
Tin Plasmas

High-radiance extreme-ultraviolet light source for actinic inspection and metrology

2012 ◽  
Vol 11 (2) ◽  
pp. 021107-1 ◽  
Author(s):  
Peter Choi ◽  
Sergey V. Zakharov ◽  
Raul Aliaga-Rossel ◽  
Aldrice Bakouboula ◽  
Otman Benali ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light

scholarly journals Power scaling of an extreme ultraviolet light source for future lithography

2008 ◽  
Vol 92 (18) ◽  
pp. 181501 ◽  
Author(s):  
Erik Wagenaars ◽  
Felix Küpper ◽  
Jürgen Klein ◽  
Willi Neff ◽  
Marcel Damen ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Power Scaling ◽  
Extreme Ultraviolet Light

Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source

2008 ◽  
Vol 93 (22) ◽  
pp. 221503 ◽  
Author(s):  
S. Yuspeh ◽  
K. L. Sequoia ◽  
Y. Tao ◽  
M. S. Tillack ◽  
R. Burdt ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Focal Spot ◽  
Extreme Ultraviolet ◽  
Size Ratio ◽  
Laser Focal Spot ◽  
Extreme Ultraviolet Light
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