Study of organic polymer thin-film etching by plasma beam irradiation
Measurement of desorbed products during organic polymer thin film etching by plasma beam irradiation
2006 ◽
Vol 24
(6)
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pp. 2217-2222
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2019 ◽
Vol 213
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pp. 348-358
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2002 ◽
Vol 31
(5)
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pp. 512-519
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2004 ◽
Vol 10
(4)
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pp. 840-848
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