Semiconductor gas sensor based on tin oxide nanorods prepared by plasma-enhanced chemical vapor deposition with postplasma treatment

2005 ◽  
Vol 87 (16) ◽  
pp. 163123 ◽  
Author(s):  
Hui Huang ◽  
O. K. Tan ◽  
Y. C. Lee ◽  
T. D. Tran ◽  
M. S. Tse ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Sensor ◽  
Tin Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Semiconductor Gas Sensor ◽  
Oxide Nanorods

Molecular-Sieving Gas Sensor Prepared by Chemical Vapor Deposition of Silica on Tin Oxide Using an Organic Template

1998 ◽  
Vol 71 (2) ◽  
pp. 513-519 ◽  
Author(s):  
Nobuaki Kodakari ◽  
Takeshi Sakamoto ◽  
Kouji Shinkawa ◽  
Hisato Funabiki ◽  
Naonobu Katada ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Sensor ◽  
Tin Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Template ◽  
Molecular Sieving

scholarly journals NO gas sensor based on ZnGa2O4 epilayer grown by metalorganic chemical vapor deposition

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Min-Ru Wu ◽  
Wei-Zhong Li ◽  
Chun-Yi Tung ◽  
Chiung-Yi Huang ◽  
Yi-Hung Chiang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Sensor ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Metalorganic Chemical
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