Si wafer bonded of a‐Si∕a‐SiNx distributed Bragg reflectors for 1.55‐μm-wavelength vertical cavity surface emitting lasers
1995 ◽
Vol 7
(3)
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pp. 229-231
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2001 ◽
Vol 148
(2)
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pp. G25
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2018 ◽
Vol 82
(1)
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pp. 012502
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