Highly sensitive detection technique of buried defects in extreme ultraviolet masks using at-wavelength scanning dark-field microscopy

2005 ◽  
Vol 87 (2) ◽  
pp. 024102 ◽  
Author(s):  
V. Farys ◽  
P. Schiavone ◽  
F. Polack ◽  
M. Idir ◽  
M. Bertolo ◽  
...  
2015 ◽  
Vol 51 (77) ◽  
pp. 14485-14488 ◽  
Author(s):  
Abhijit Saha ◽  
Fumitaka Hashiya ◽  
Seiichiro Kizaki ◽  
Sefan Asamitsu ◽  
Kaori Hashiya ◽  
...  

We demonstrate a highly sensitive detection technique of polyamide binding sites using the photochemistry of BrU labeled DNA.


ACS Sensors ◽  
2018 ◽  
Vol 3 (10) ◽  
pp. 2175-2181 ◽  
Author(s):  
Fenglei Chen ◽  
Fang Tang ◽  
Chih-Tsung Yang ◽  
Xinyao Zhao ◽  
Jun Wang ◽  
...  

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