Thermal stability of hafnium–silicate and plasma-nitrided hafnium silicate films studied by Fourier transform infrared spectroscopy
2016 ◽
Vol 47
(6)
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pp. 993-1005
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2014 ◽
Vol 1048
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pp. 423-426
1999 ◽
2016 ◽
1992 ◽
Vol 7
(3)
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pp. 155-157
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