Electron tunneling spectroscopy study of traps in high-k gate dielectrics: Determination of physical locations and energy levels of traps

2005 ◽  
Vol 86 (19) ◽  
pp. 192113 ◽  
Author(s):  
Miaomiao Wang ◽  
Wei He ◽  
T. P. Ma
Keyword(s):  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Energy Levels ◽  
Tunneling Spectroscopy ◽  
Spectroscopy Study ◽  
High K ◽  
Electron Tunneling Spectroscopy

Inelastic Electron Tunneling Spectroscopy Study of Thin Gate Dielectrics

2010 ◽  
Vol 22 (26-27) ◽  
pp. 2962-2968 ◽  
Author(s):  
James W. Reiner ◽  
Sharon Cui ◽  
Zuoguang Liu ◽  
Miaomiao Wang ◽  
Charles H. Ahn ◽  
...  
Keyword(s):  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Tunneling Spectroscopy ◽  
Inelastic Electron ◽  
Spectroscopy Study ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy
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