Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ analysis and collisional computer simulation
2005 ◽
Vol 78
(1)
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pp. 1-39
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2017 ◽
Vol 277
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pp. 179-187
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1992 ◽
Vol 60
(7)
◽
pp. 662-663
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