Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide

2004 ◽  
Vol 85 (21) ◽  
pp. 4875-4877 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Hiroharu Fujita
Keyword(s):  
Radio Frequency ◽  
Electron Emission ◽  
Secondary Electron ◽  
Discharge Plasma ◽  
Secondary Electron Emission ◽  
High Density ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

scholarly journals The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge

Atoms ◽  
2018 ◽  
Vol 6 (4) ◽  
pp. 65 ◽  
Author(s):  
Andrea Proto ◽  
Jon Gudmundsson
Keyword(s):  
Electron Density ◽  
Electron Energy ◽  
Electron Emission ◽  
Secondary Electron ◽  
Probability Function ◽  
Secondary Electron Emission ◽  
Capacitively Coupled ◽  
Electron Reflection ◽  
Oxygen Discharge ◽  
Plasma Bulk

The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is applied to explore the role of secondary electron emission and electron reflection on the properties of the capacitively-coupled oxygen discharge. At low pressure (10 mTorr), drift-ambipolar heating of the electrons dominates within the plasma bulk, while at higher pressure (50 mTorr), stochastic electron heating in the sheath region dominates. Electron reflection has negligible influence on the electron energy probability function and only a slight influence on the electron heating profile and electron density. Including ion-induced secondary electron emission in the discharge model introduces a high energy tail to the electron energy probability function, enhances the electron density, lowers the electronegativity, and increases the effective electron temperature in the plasma bulk.

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