A loss mechanism study of a very high Q silicon micromechanical oscillator
1995 ◽
Vol 44
(2)
◽
pp. 113-116
◽
2000 ◽
2007 ◽
Vol 37
(2a)
◽
pp. 425-428
◽
1997 ◽
Vol 74
(2)
◽
pp. 191-205
◽