A multichannel electron energy loss spectrometer for low-temperature condensed films

2004 ◽  
Vol 121 (21) ◽  
pp. 10542-10550 ◽  
Author(s):  
Donald E. David ◽  
Duška B. Popović ◽  
Dean Antic ◽  
Josef Michl
Keyword(s):  
Low Temperature ◽  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectrometer ◽  
Electron Energy Loss

In Situ Analysis of Surface Contaminant Desorption during Low-Temperature Silicon Substrate Cleaning using Reflection Electron Energy Loss Spectrometry

1992 ◽  
Vol 259 ◽  
Author(s):  
Selmer S. Wong ◽  
Shouleh Nikzad ◽  
Channing C. Ahn ◽  
Aimee L. Smith ◽  
Harry A. Atwater
Keyword(s):  
Low Temperature ◽  
Energy Loss ◽  
Electron Energy ◽  
Core Loss ◽  
Temperature Dependent ◽  
Electron Energy Loss Spectrometry ◽  
Analysis Technique ◽  
Chemical Analysis Technique ◽  
Electron Energy Loss

ABSTRACTWe have employed reflection electron energy loss spectrometry (REELS), a surface chemical analysis technique, in order to analyze contaminant coverages at the submonolayer level during low-temperature in situ cleaning of hydrogen-terminated Si(100). The chemical composition of the surface was analyzed by measurements of the C K, O K and Si L2,3 core loss intensities at various stages of the cleaning. These results were quantified using SiC(100) and SiO2 as reference standards for C and O coverage. Room temperature REELS core loss intensity analysis after sample insertion reveals carbon at fractional monolayer coverage. We have established the REELS detection limit for carbon coverage to be 5±2% of a monolayer. A study of temperature-dependent hydrocarbon desorption from hydrogen-terminated Si(100) reveals the absence of carbon on the surface at temperatures greater than 200°C. This indicates the feasibility of epitaxial growth following an in situ low-temperature cleaning and also indicates the power of REELS as an in situ technique for assessment of surface cleanliness.

A New High Performance Electron Energy Loss Spectrometer for use with Monochromated Microscopes

2001 ◽  
Vol 7 (S2) ◽  
pp. 908-909
Author(s):  
H.A. Brink ◽  
M. Barfels ◽  
B. Edwards ◽  
P. Burgner
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Energy Resolution ◽  
Optical Design ◽  
Electron Source ◽  
High Voltage Power Supply ◽  
Electron Energy Loss Spectrometer ◽  
Electron Microscopes ◽  
Electron Energy Loss ◽  
Better Than

A new type of electron energy loss spectrometer for use with monochromated microscopes is presented. The energy resolution of the spectrometer is better than 0.100 eV. A completely new electron optical design with a number of extra optical elements and advanced tuning software makes it possible to correct spectrum aberrations to 4th order, which increases sensitivity and collection angles. New high-stability electronics make it possible to maintain energy resolution over a period of several minutes in a practical laboratory environment.The energy resolution of Transmission Electron Microscopes (TEMs) equipped with electron energy loss spectrometers is determined by a combination of the energy spread of the electron source, the stability of the microscope’s high voltage power supply, and the energy resolution of the spectrometer. Commercial microscopes usually employ electron sources with an energy distributions of around 0.5 eV or more (FWHM), limiting the energy ultimate energy resolution that can be achieved. Recently FEI constructed a special 200 kV TEM with a built-in monochromator which makes it possible to monochromize the electron source to better than 0.100 eV. A prototype of the presented spectrometer has been installed on this microscope.

Measurement of TEM primary energy with an electron energy-loss spectrometer

1995 ◽  
Vol 59 (1-4) ◽  
pp. 283-285 ◽  
Author(s):  
C.E. Meyer ◽  
C.B. Boothroyd ◽  
A.J. Gubbens ◽  
O.L. Krivanek
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Primary Energy ◽  
Electron Energy Loss Spectrometer ◽  
Electron Energy Loss
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