Development of multicathode high flux metal ion plasma sources in Korea

2004 ◽  
Vol 75 (9) ◽  
pp. 3068-3070
Author(s):  
Do-Yun Kim ◽  
Eui-Wan Lee ◽  
Myoung-Bok Lee
Keyword(s):  
Metal Ion ◽  
High Flux ◽  
Plasma Sources ◽  
Ion Plasma

Generation characteristics of a metal ion plasma jet in vacuum discharge

2018 ◽  
Vol 20 (8) ◽  
pp. 085403 ◽  
Author(s):  
Jia TIAN ◽  
Wenzheng LIU ◽  
Weisheng CUI ◽  
Yongjie GAO
Keyword(s):  
Metal Ion ◽  
Plasma Jet ◽  
Vacuum Discharge ◽  
Ion Plasma

Plasma Sources for a High Flux of Active Species

2021 ◽  
pp. 202-231
Author(s):  
Alinka Vesel ◽  
Miran Mozetic ◽  
A. Ricard
Keyword(s):  
Active Species ◽  
High Flux ◽  
Plasma Sources

Negative‐ion plasma sources

1988 ◽  
Vol 59 (8) ◽  
pp. 1369-1375 ◽  
Author(s):  
D. P. Sheehan ◽  
N. Rynn
Keyword(s):  
Negative Ion ◽  
Plasma Sources ◽  
Ion Plasma

Performance study on a metal ion plasma thruster using a trumpet-shaped insulated anode with double micropores

2020 ◽  
Vol 62 (3) ◽  
pp. 035012 ◽  
Author(s):  
Jia Tian ◽  
Wenzheng Liu ◽  
Yongjie Gao ◽  
Wenjun Zhang ◽  
Luxiang Zhao
Keyword(s):  
Metal Ion ◽  
Performance Study ◽  
Ion Plasma ◽  
Plasma Thruster

scholarly journals OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES

2018 ◽  
pp. 99-102
Author(s):  
I. A. Ivanov ◽  
A. G. Slutsky ◽  
V. A. Sheinert ◽  
E. V. Kovalevich ◽  
V. N. Khlebtsevich
Keyword(s):  
High Speed ◽  
Experimental Studies ◽  
Correct Choice ◽  
Induction Melting ◽  
Plasma Sources ◽  
Vacuum Plasma ◽  
Ion Plasma ◽  
Chemical Purity ◽  
Process Gases

The coatings based on silicides of various metals are widely used in various industries by vacuum-plasma processes for products treatment. The quality of such coatings is determined by the degree of chemical purity of the target cathode, the correct choice of a mixture of process gases and the level of accelerating potential supplied to the substrate. Traditional methods for producing multi-component targets have a number of disadvantages, such as: high residual porosity, excess content of impurities, as well as the need for expensive equipment.The use of casting technologies in the production of target cathodes is promising. The paper presents the generalized results of experimental studies of manufacturing target cathodes for vacuum ion-plasma sources by methods of reduction and high-speed induction melting. Silicides of titanium, copper and nickel were used as the material.

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