Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films

2004 ◽  
Vol 96 (5) ◽  
pp. 2800-2804 ◽  
Author(s):  
P. Gerber ◽  
A. Roelofs ◽  
C. Kügeler ◽  
U. Böttger ◽  
R. Waser ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Electrode Size ◽  
Zirconate Titanate

Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

2019 ◽  
Vol 239 ◽  
pp. 71-74 ◽  
Author(s):  
Tomoya Ohno ◽  
Kentaroh Fukumitsu ◽  
Takamasa Honda ◽  
Akinori Sakamoto ◽  
Sadaaki Tanaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Si Substrate ◽  
Zirconate Titanate

scholarly journals Effects of ferroelectric fatigue on the piezoelectric properties (d33) of tetragonal lead zirconate titanate thin films

2005 ◽  
Vol 86 (11) ◽  
pp. 112908 ◽  
Author(s):  
P. Gerber ◽  
C. Kügeler ◽  
U. Ellerkmann ◽  
P. Schorn ◽  
U. Böttger ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Zirconate Titanate

Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates

2014 ◽  
Vol 40 (1) ◽  
pp. 1013-1018 ◽  
Author(s):  
Minh D. Nguyen ◽  
Thong Q. Trinh ◽  
Matthijn Dekkers ◽  
Evert P. Houwman ◽  
Hung N. Vu ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Si Substrates ◽  
Zirconate Titanate ◽  
Ferroelectric And Piezoelectric Properties

scholarly journals Piezoelectric Properties of Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 Thin Films Studied by In Situ X-ray Diffraction

Materials ◽  
2020 ◽  
Vol 13 (15) ◽  
pp. 3338
Author(s):  
Thomas W. Cornelius ◽  
Cristian Mocuta ◽  
Stéphanie Escoubas ◽  
Luiz R. M. Lima ◽  
Eudes B. Araújo ◽  
...  
Keyword(s):  
Thin Films ◽  
Electric Fields ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
X Ray ◽  
Ac Electric Fields ◽  
Zirconate Titanate

The piezoelectric properties of lanthanum-modified lead zirconate titanate Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 thin films, with x = 0, 3 and 12 mol% La, were studied by in situ synchrotron X-ray diffraction under direct (DC) and alternating (AC) electric fields, with AC frequencies covering more than four orders of magnitude. The Bragg reflections for thin films with low lanthanum concentration exhibit a double-peak structure, indicating two contributions, whereas thin films with 12% La possess a well-defined Bragg peak with a single component. In addition, built-in electric fields are revealed for low La concentrations, while they are absent for thin films with 12% of La. For static and low frequency AC electric fields, all lanthanum-modified lead zirconate titanate thin films exhibit butterfly loops, whereas linear piezoelectric behavior is found for AC frequencies larger than 1 Hz.

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