Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings

2004 ◽  
Vol 96 (4) ◽  
pp. 1983-1987 ◽  
Author(s):  
Tengjiao Hu ◽  
Ronald L. Jones ◽  
Wen-li Wu ◽  
Eric K. Lin ◽  
Qinghuang Lin ◽  
...  
Keyword(s):  
Cross Section ◽  
Small Angle ◽  
Nanometer Scale ◽  
X Ray ◽  
X Ray Scattering ◽  
Scale Line ◽  
Sidewall Angle ◽  
Ray Scattering

Correlation of Small-Angle X-Ray Scattering and Solar Cell Performance of a-SiGe:H Alloys

1993 ◽  
Vol 297 ◽  
Author(s):  
S.J. Jones ◽  
Y. Chen ◽  
D.L. Williamson ◽  
X. Xu ◽  
J. Yang ◽  
...  
Keyword(s):  
Solar Cell ◽  
Small Angle ◽  
Film Surface ◽  
Nanometer Scale ◽  
Low Density ◽  
Solar Cell Performance ◽  
X Ray ◽  
X Ray Scattering ◽  
Cell Structures ◽  
Ray Scattering

Small-angle x-ray scattering (SAXS) measurements were made on a-SiGe:H alloys to study microstructure on the nanometer scale as a function of Ge content, and the results were compared with representative single-junction solar cell properties. Samples consisting of only the i-layer were used for SAXS. Above a Ge content of 20 %, a significant increase in SAXS was seen. From measurements made with the samples tilted relative to the incident x-ray beam, the increase in scattering is attributed to the appearance of elongated low density regions in the film, modeled as ellipsoidal microvoids, which are preferentially oriented perpendicular to the film surface and may be related to columnar-like microstructure. Flotation density measurements support the presence of low density regions. Initial and light-degraded measurements on corresponding solar cell structures do not show a correlation between SAXS and initial cell properties; there is, however, some evidence that the light-induced degradation is higher for cells with larger amounts of SAXS-detected microstructure and this needs further investigation.

Characterization of TEMPO-oxidized cellulose nanofibers in aqueous suspension by small-angle X-ray scattering

2014 ◽  
Vol 47 (2) ◽  
pp. 788-798 ◽  
Author(s):  
Ying Su ◽  
Christian Burger ◽  
Benjamin S. Hsiao ◽  
Benjamin Chu
Keyword(s):  
Cross Section ◽  
Small Angle ◽  
Structural Information ◽  
Rectangular Cross Section ◽  
Aqueous Suspension ◽  
Cellulose Nanofibers ◽  
Weighted Average ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Cellulose nanofibers, extracted from wood pulps using the (2,2,6,6-tetramethylpiperidine-1-yl)oxyl (TEMPO)-mediated oxidation method, are low-cost, sustainable and high-performance materials with potential usage in many applications. The structural information of these cellulose nanofibers in aqueous suspension was characterized by synchrotron small-angle X-ray scattering (SAXS). A simplified ribbon model having a near rectangular cross section was found to give the best fit to the SAXS results. The analytical expression of the ribbon model also led to a higher calculation efficiency compared with the more conventional parallelepiped model. The extracted structural information included the cross-section size and size distribution of the cellulose nanofibers. For example, for nanofibers prepared from the dried pulp of the maritime pine, the size-weighted averages of thickness and width were 3.2 and 12.7 nm, respectively, and the corresponding standard deviations were 2.2 and 5.5 nm, respectively. The scattering results of the size-weighted average of the nanofiber width are also consistent with those determined directly from transmission electron microscopy.

Anomalous Small Angle X-Ray Scattering Studies of Metal-Germanium Alloys

1990 ◽  
Vol 187 ◽  
Author(s):  
Marybeth Rice ◽  
Soichi Wakatsuki ◽  
Arthur Bienenstock
Keyword(s):  
Small Angle ◽  
Density Fluctuations ◽  
Nanometer Scale ◽  
X Ray ◽  
Composition Modulation ◽  
X Ray Scattering ◽  
Metal Atoms ◽  
Electron Density Fluctuations ◽  
Scale Composition ◽  
Ray Scattering

AbstractThe tunability of synchrotron radiation was used to perform anomalous small angle x-ray scattering (ASAXS) experiments on amorphous metal-germanium (a-Mx Ge1−x) alloys with the aim of detecting and characterizing compohitioK modulation and phase separation. Small angle x-ray scattering is sensitive to electron density fluctuations on a scale of tens to thousands of Angstroms. The combination of SAXS with the anomalous dispersion effect allows one to distinguish composition modulation from density fluctuations arising from voids and defects. Data gathered from a-FexGe1−x and a-WxGe1−x samples in the low metal concentration regime show nanometer scale composition modulation. In these samples the density of Ge atoms is uniform throughout the sample. The small angle x-ray scattering arises from fluctuations in the density of metal atoms.

3D Small Angle X-Ray Scattering (SAXS) on deformed PVDF Foils

2003 ◽  
Vol 782 ◽  
Author(s):  
Guenther Maier ◽  
Gernot Wallner ◽  
Peter Fratzl
Keyword(s):  
Small Angle ◽  
Deformation Mechanism ◽  
Structural Changes ◽  
Three Dimensional ◽  
Nanometer Scale ◽  
X Ray ◽  
X Ray Scattering ◽  
Structure Changes ◽  
Bundle Structure ◽  
Ray Scattering

ABSTRACT3D Small Angle X-ray scattering (3D – SAXS) was applied to study the microstructure and the deformation mechanism in PVDF – foils (polyvinyhdene fluoride). SAXS is a powerful tool to investigate structural changes in deformed polymers to reveal morphology at the nanometer scale. When PVDF is strained the structure changes from spherohtic isotropie to a highly anisotropie fiber bundle structure, which requires a full three-dimensional analysis of the SAXS signal.

Small-angle X-ray scattering from helical macromolecules

1971 ◽  
Vol 4 (4) ◽  
pp. 290-293 ◽  
Author(s):  
O. A. Pringle ◽  
P. W. Schmidt
Keyword(s):  
Cross Section ◽  
Small Angle ◽  
Dna Molecules ◽  
X Ray ◽  
X Ray Scattering ◽  
Good Agreement ◽  
Ray Scattering

An earlier calculation of the intensity of small-angle X-ray scattering from helical filaments is extended to give an expression for the intensity from helical macromolecules with a finite cross section. The results are in quite good agreement with an experimental scattering curve for a solution of DNA molecules.

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