Finite Element Analysis for Development of Next-generation Heater in Heat Treatment Process for Silicon wafer
2019 ◽
Vol 47
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pp. 110-118
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Keyword(s):
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2008 ◽
Vol 575-578
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pp. 1461-1466
1994 ◽
pp. 215-233
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2006 ◽
Vol 30
(10)
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pp. 1284-1292
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2012 ◽
Vol 22
(9)
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pp. 2226-2232
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Keyword(s):