Properties of nitrogen-implanted p-type ZnO films grown on Si3N4/Si by radio-frequency magnetron sputtering

Chin-Ching Lin; San-Yuan Chen; Syh-Yuh Cheng; Hsin-Yi Lee

doi:10.1063/1.1763640

Properties of nitrogen-implanted p-type ZnO films grown on Si3N4/Si by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.1763640 ◽

2004 ◽

Vol 84 (24) ◽

pp. 5040-5042 ◽

Cited By ~ 146

Author(s):

Chin-Ching Lin ◽

San-Yuan Chen ◽

Syh-Yuh Cheng ◽

Hsin-Yi Lee

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

P Type

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Nitrogen-doped p-type ZnO films prepared from nitrogen gas radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.2337766 ◽

2006 ◽

Vol 100 (5) ◽

pp. 053705 ◽

Cited By ~ 82

Author(s):

Ming-Lung Tu ◽

Yan-Kuin Su ◽

Chun-Yang Ma

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Nitrogen Gas ◽

Nitrogen Doped ◽

P Type

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P-doped p-type ZnO films deposited on Si substrate by radio-frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.2193798 ◽

2006 ◽

Vol 88 (15) ◽

pp. 152102 ◽

Cited By ~ 60

Author(s):

P. Wang ◽

NuoFu Chen ◽

Z. G. Yin

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate ◽

P Type

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Realization of p-type Se–N co-doped ZnO films by radio-frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2013.07.008 ◽

2013 ◽

Vol 108 ◽

pp. 183-185 ◽

Cited By ~ 7

Author(s):

Hui Cai ◽

Hongbin Xu ◽

Zhizhen Ye ◽

Jingyun Huang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

P Type ◽

Co Doped

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As-doped p-type ZnO films grown on SiO2/Si by radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2008.03.193 ◽

2008 ◽

Vol 254 (20) ◽

pp. 6358-6361 ◽

Cited By ~ 9

Author(s):

J.C. Fan ◽

Z. Xie

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

P Type

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Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2009.00602 ◽

2009 ◽

Vol 24 (3) ◽

pp. 602-606 ◽

Cited By ~ 1

Author(s):

Wei-Jia FU ◽

Zhi-Wen LIU ◽

Jian-Feng GU ◽

Ming LIU ◽

Qing-Yu ZHANG

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Morphological Evolution ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Negative Bias ◽

Radio Frequency Magnetron Sputtering

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Research on property and wet etch of ZnO films grown by radio-frequency magnetron sputtering

2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications ◽

10.1109/spawda.2008.4775769 ◽

2008 ◽

Author(s):

Rui Chen ◽

Xu-ming Bian ◽

Bai-jie Fan ◽

Chun-he He ◽

Li Li

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Wet Etch

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Relation between surface and bulk electronic properties of Al doped ZnO films deposited at varying substrate temperature by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4923224 ◽

2015 ◽

Vol 117 (24) ◽

pp. 245312 ◽

Cited By ~ 16

Author(s):

C. C. Singh ◽

T. A. Patel ◽

E. Panda

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Electronic Properties ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno

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Growth of c-axis orientation ZnO films on polymer substrates by radio-frequency magnetron sputtering

Optical Materials ◽

10.1016/j.optmat.2007.06.003 ◽

2008 ◽

Vol 30 (8) ◽

pp. 1244-1250 ◽

Cited By ~ 11

Author(s):

Kaixin Chen ◽

Kin Seng Chiang ◽

Hau Ping Chan ◽

Pak Lim Chu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Axis Orientation ◽

Polymer Substrates

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Growth of non-polar ZnO films on a-GaN/r-Al2O3 templates by radio-frequency magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2009.09.098 ◽

2010 ◽

Vol 489 (2) ◽

pp. 519-522 ◽

Cited By ~ 16

Author(s):

J.N. Dai ◽

X.Y. Han ◽

Z.H. Wu ◽

C.H. Yu ◽

R.F. Xiang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering

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Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.11.103 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3265-3268 ◽

Cited By ~ 59

Author(s):

C. Li ◽

M. Furuta ◽

T. Matsuda ◽

T. Hiramatsu ◽

H. Furuta ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

Doped Zno

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