Low temperature oxidation of SiC preamorphized by ion implantation
Keyword(s):
2009 ◽
Keyword(s):
2007 ◽
Vol 42
(12)
◽
pp. 4684-4691
◽
2017 ◽
Vol 36
(1)
◽
pp. 365-372
◽
Keyword(s):