Electrodynamics of a magnetic levitation coil

1973 ◽  
Vol 44 (6) ◽  
pp. 2829-2837 ◽  
Author(s):  
J. Langerholc
Keyword(s):  
Magnetic Levitation ◽  
Levitation Coil

Micro-Force Calibration with an All-Coil Magnetic Levitation

2005 ◽  
Vol 295-296 ◽  
pp. 95-100
Author(s):  
S.W. Hsu ◽  
T.L. Chen
Keyword(s):  
Electromagnetic Force ◽  
Magnetic Force ◽  
Magnetic Levitation ◽  
Force Balance ◽  
Force Output ◽  
Preliminary Measurement ◽  
Measurement Results ◽  
Force Calibration ◽  
The Magnetic Field ◽  
Levitation Coil

A prototype all-coil electromagnetic force balance has been designed and built. This measurement system compares the mechanical force to an SI realization of electromagnetic force, which is driven from interaction of currents in radial coil set and levitation coil. The preliminary measurement results demonstrate that the magnetic field distribution and magnetic force output are consistent with the results by simulation.

A Micro Conveyance Actuator based on Superconducting Magnetic Levitation

1999 ◽  
Vol 119 (8-9) ◽  
pp. 417-423 ◽  
Author(s):  
Iizuka Tetsuhiko ◽  
Fujita Hiroyuki
Keyword(s):  
Magnetic Levitation

scholarly journals Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor

2021 ◽  
Vol 11 (5) ◽  
pp. 2396
Author(s):  
Jong Suk Lim ◽  
Hyung-Woo Lee
Keyword(s):  
Motor System ◽  
Control Method ◽  
Magnetic Levitation ◽  
Movement Control ◽  
Position Sensor ◽  
Semiconductor Wafer ◽  
Control Command ◽  
Levitation System ◽  
Magnetic Levitation System ◽  
Contact Position

This paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin coater used in the photoresist coating process in the semiconductor wafer process. To eliminate system wear and dust problems, a shaft-and-bearing-free magnetic levitation motor system was designed and a minimal non-contact position sensor was placed. An algorithm capable of preventing derailment and precise movement control by applying only control without additional mechanical devices to this magnetic levitation system was proposed. The proposed algorithm was verified through simulations and experiments, and the validity of the algorithm was verified by deriving a precision control result suitable for the movement control command in units of 0.1 mm at 50 rpm rotation drive.

Sign in / Sign up

Export Citation Format

Share Document