Positive‐ion bombardment of substrates in rf diode glow discharge sputtering

1972 ◽  
Vol 43 (12) ◽  
pp. 4965-4971 ◽  
Author(s):  
J. W. Coburn ◽  
Eric Kay
Keyword(s):  
Glow Discharge ◽  
Ion Bombardment ◽  
Positive Ion

Ion Bombardment Magnetron Furnace for Atomic Spectroscopy

1989 ◽  
Vol 43 (6) ◽  
pp. 918-924 ◽  
Author(s):  
Suzanne Tanguay ◽  
Richard Sacks
Keyword(s):  
Magnetic Field ◽  
Glow Discharge ◽  
Cathode Surface ◽  
Ion Bombardment ◽  
Atomic Spectroscopy ◽  
Temperature Plasma ◽  
Graphite Cathode ◽  
Pressure Glow Discharge ◽  
Current Conduction ◽  
Positive Ion

Positive-ion bombardment of a graphite cathode in a low-pressure glow discharge is used to heat the cathode to temperatures in excess of 2000°C. A magnetic field of a few hundred Gauss used in a magnetron configuration reduces lamp voltage and permits operation at less than 1 kV with cathode current densities greater than 350 mA/cm2. A solution residue sample deposited on the 1.6-mm-diameter graphite cathode is atomized in about one second. The atomic vapor is excited in the glow discharge near the cathode surface. The effects of pressure and magnetic field strength on furnace performance are described. At low furnace temperature, plasma current conduction is by electrons produced by positive ion bombardment of the cathode surface. At higher temperatures, current conduction is largely by thermionic electrons.

scholarly journals Electron yield of glow discharge cathode materials under helium ion bombardment

1988 ◽  
Vol 53 (5) ◽  
pp. 358-360 ◽  
Author(s):  
B. Szapiro ◽  
J. J. Rocca ◽  
T. Prabhuram
Keyword(s):  
Glow Discharge ◽  
Cathode Materials ◽  
Ion Bombardment ◽  
Electron Yield ◽  
Helium Ion

Positive ion fractions of recoiled A1 and O from O-adsorbed Al surfaces by low-energy ion bombardment

1994 ◽  
Vol 319 (3) ◽  
pp. 353-362 ◽  
Author(s):  
T. Hashimoto ◽  
J. Murakami ◽  
I. Kusunoki
Keyword(s):  
Ion Bombardment ◽  
Low Energy ◽  
Positive Ion

The Positive Ion Current at the Cathode in the Glow Discharge

1932 ◽  
Vol 42 (6) ◽  
pp. 786-794 ◽  
Author(s):  
A. Keith Brewer ◽  
R. R. Miller
Keyword(s):  
Glow Discharge ◽  
Ion Current ◽  
Positive Ion
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