Bulk-acoustic waves radiated from low-loss surface-acoustic-wave resonators

2004 ◽  
Vol 84 (9) ◽  
pp. 1579-1581 ◽  
Author(s):  
J. V. Knuuttila ◽  
J. J. Vartiainen ◽  
J. Koskela ◽  
V. P. Plessky ◽  
C. S. Hartmann ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Low Loss ◽  
Bulk Acoustic Waves ◽  
Acoustic Wave Resonators

OBLIQUE ACOUSTIC AXES IN TRIGONAL CRYSTALS

2001 ◽  
Vol 09 (03) ◽  
pp. 1147-1161 ◽  
Author(s):  
V. G. MOZHAEV ◽  
F. BOSIA ◽  
M. WEIHNACHT
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Elastic Symmetry ◽  
Bulk Acoustic Waves ◽  
General Orientation ◽  
General Derivation ◽  
The Subject ◽  
The Relationship

A general analysis on the subject of acoustic axes for bulk acoustic waves in trigonal crystals is presented. It is shown that the effect of piezoelectricity increases the maximum allowable number of acoustic axes in the plane of elastic symmetry from three to five for trigonal crystals of class 3m, and from 3 to 7 for trigonal crystals of class 32. The theory of acoustic axes of general orientation developed by Khatkevich (1962) is revised. A new, simpler and more general derivation of the conditions for the occurrence of acoustic axes of general orientation in crystals is presented. It is found that the previous analytical results and conclusions stating the absence of such axes in trigonal crystals are incorrect. New correct equations for acoustic axes of general orientation in trigonal nonpiezoelectric crystals are derived and confirmed by independent numerical calculations. Acoustic axes of general orientation oblique to the elastic symmetry planes are found to exist in berlinite (class 32) and in nonpiezoelectric lithium niobate (class 3m), however piezoelectricity eliminates these axes in the latter crystal. Some illustrative examples of the relationship between leaky surface acoustic wave branches and acoustic axes in trigonal crystals are given.

scholarly journals Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Inertial Sensors ◽  
Surface Acoustic Waves ◽  
Sensing Element ◽  
Small Series ◽  
Evaporation Technique ◽  
Photolithography Process

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

Low loss surface acoustic wave SAW devices based on Al1-xMxN (M=Cr, Y, Sc) thin films

2021 ◽  
pp. 412990
Author(s):  
Saad Amara ◽  
Fares Kanouni ◽  
Farouk Laidoudi ◽  
Khaled Bouamama
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Loss ◽  
Saw Devices

Fast simulation method of Distributed Nonlinearities in Surface Acoustic Wave Resonators

2020 ◽  
Author(s):  
M Gonzalez-Rodriguez ◽  
Carlos Collado ◽  
Jordi Mateu ◽  
J.M. Gonzalez-Arbesu ◽  
Sebastian Huebner ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Simulation Method ◽  
Fast Simulation ◽  
Fast Simulation Method ◽  
Acoustic Wave Resonators

Pressure sensor based on surface acoustic wave resonators

2008 ◽  
Author(s):  
M. Benetti ◽  
D. Cannata ◽  
F. Di Pietrantonio ◽  
C. Marchiori ◽  
P. Persichetti ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Pressure Sensor ◽  
Acoustic Wave Resonators

1.9 GHz Low-Loss Surface Acoustic Wave Filter: Lift-Off Method and 3 mm Square Small Size Package

1994 ◽  
Vol 33 (Part 1, No. 5B) ◽  
pp. 2984-2988 ◽  
Author(s):  
Naoyuki Mishima ◽  
Yasushi Kuroda ◽  
Reiko Kobayashi ◽  
Toshiyuki Takagi
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Low Loss ◽  
Lift Off ◽  
Wave Filter
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