ABSTRACTTwo dimensional Er3+-TeO2 thin film photonics crystals (PhCs) are fabricated. These PhCs demonstrate broadband enhancement of PL emission at near Infrared (NIR). The PhC structures are written by dual beam focused ion beam (FIB). Highly uniformed patterns with smooth surfaces are observed. A pattern resolution better than hundred nanometers is achieved. PhCs arrays with photonic lattice constants from 350 nm to 1700 nm are examined in order to optimize the PL extraction efficiency. Strong photoluminescence around 1530 nm is observed by 488-532 nm lasers pumping. A confocal microscopy with spectrometer is used to capture the broadband PL signals from individual PhC array.The emission enhancement factor and spectral dependent extraction ratio are analyzed to find the interaction between PL lightwave and PhC structures. By optimize the PhC structures, 1500 um-1560 um broadband PL is successfully converted between the PL emission layer and the external cavity. A 60 % enhancement of surface extraction efficiency is achieved when PhC with periodicity a=800 nm is applied. When photonic lattice constants a are smaller than the critical periodicity 600 nm, the PL light becomes confined inside the thin film layer. Simulation is also performed by two dimensional finite difference time domain (FDTD) calculation in order to explain the experimental observed anisotropic PL enhancements.The broadband PL enhancement enables Er3+-TeO2 PhCs thin film as a potential light source for three dimensional integrated photonic circuits.
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