Reoxidation of silicon nitride studied using x-ray photoelectron spectroscopy and transmission electron microscopy
2016 ◽
Vol 120
(34)
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pp. 19204-19211
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2019 ◽
Vol 10
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pp. 62-70
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2019 ◽
Vol 79
(7)
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pp. 1276-1286
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2012 ◽
Vol 137
(2)
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pp. 493-498
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2001 ◽
Vol 16
(10)
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pp. 2805-2809
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