Characterization of ultrathin dopant segregation layers in nanoscale metal–oxide–semiconductor field effect transistors using scanning transmission electron microscopy

T. Topuria; N. D. Browning; Z. Ma

doi:10.1063/1.1626001

Characterization of ultrathin dopant segregation layers in nanoscale metal–oxide–semiconductor field effect transistors using scanning transmission electron microscopy

Applied Physics Letters ◽

10.1063/1.1626001 ◽

2003 ◽

Vol 83 (21) ◽

pp. 4432-4434 ◽

Cited By ~ 12

Author(s):

T. Topuria ◽

N. D. Browning ◽

Z. Ma

Keyword(s):

Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Dopant Segregation ◽

Transmission Electron ◽

Scanning Transmission

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Three-Dimensional Structure Analysis of Metal–Oxide–Insulator Field Effect Transistors with Different Electrical Properties by Scanning Transmission Electron Microscopy

Applied Physics Express ◽

10.1143/apex.4.066601 ◽

2011 ◽

Vol 4 (6) ◽

pp. 066601 ◽

Cited By ~ 1

Author(s):

Shiano Ono ◽

Miyuki Yamane ◽

Hirohisa Okushima ◽

Masanari Koguchi ◽

Hiroyuki Shinada ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Electrical Properties ◽

Scanning Transmission Electron Microscopy ◽

Field Effect ◽

Field Effect Transistors ◽

Three Dimensional ◽

Dimensional Structure ◽

Transmission Electron ◽

Scanning Transmission

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Native mitochondrial creatine kinase forms octameric structures. II. Characterization of dimers and octamers by ultracentrifugation, direct mass measurements by scanning transmission electron microscopy, and image analysis of single mitochondrial creatine kinase octamers.

Journal of Biological Chemistry ◽

10.1016/s0021-9258(18)37483-0 ◽

1988 ◽

Vol 263 (32) ◽

pp. 16954-16962 ◽

Cited By ~ 8

Author(s):

T Schnyder ◽

A Engel ◽

A Lustig ◽

T Wallimann

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Image Analysis ◽

Creatine Kinase ◽

Scanning Transmission Electron Microscopy ◽

Mitochondrial Creatine Kinase ◽

Mass Measurements ◽

Transmission Electron ◽

Scanning Transmission

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Fabrication and Characterization of 1700 V 4H-SiC Vertical Double-Implanted Metal-Oxide-Semiconductor Field-Effect Transistors

Chinese Physics Letters ◽

10.1088/0256-307x/32/12/127101 ◽

2015 ◽

Vol 32 (12) ◽

pp. 127101 ◽

Cited By ~ 1

Author(s):

Hua-Jun Shen ◽

Ya-Chao Tang ◽

Zhao-Yang Peng ◽

Xiao-Chuan Deng ◽

Yun Bai ◽

...

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Fabrication And Characterization

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Secondary ion mass spectrometry characterization of source/drain junctions for strained silicon channel metal–oxide–semiconductor field-effect transistors

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1640659 ◽

2004 ◽

Vol 22 (1) ◽

pp. 327 ◽

Cited By ~ 4

Author(s):

Erika Duda ◽

Shifeng Lu ◽

Chun-Li Liu ◽

Zhixiong Jiang ◽

Joe Lerma ◽

...

Keyword(s):

Mass Spectrometry ◽

Metal Oxide ◽

Field Effect ◽

Secondary Ion Mass Spectrometry ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Strained Silicon ◽

Secondary Ion

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High-temperature modeling and characterization of 6H silicon carbide metal-oxide-semiconductor field-effect transistors

Journal of Applied Physics ◽

10.1063/1.1849424 ◽

2005 ◽

Vol 97 (4) ◽

pp. 046106 ◽

Cited By ~ 4

Author(s):

Stephen K. Powell ◽

Neil Goldsman ◽

Aivars Lelis ◽

James M. McGarrity ◽

Flynn B. McLean

Keyword(s):

Silicon Carbide ◽

High Temperature ◽

Metal Oxide ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Temperature Modeling

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Characterization of Substrate-Trap Effects in Hydrogen-Terminated Diamond Metal-Oxide-Semiconductor Field-Effect Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2021.3130016 ◽

2021 ◽

pp. 1-7

Author(s):

Zhihao Chen ◽

Xinxin Yu ◽

Jianjun Zhou ◽

Shuman Mao ◽

Yuechan Kong ◽

...

Keyword(s):

Metal Oxide ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor

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Modeling and Characterization of InAs Quantum-Well Metal-Oxide-Semiconductor Field Effect Transistors on Quartz for 1.0 THz Wave Detection

2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) ◽

10.1109/edtm47692.2020.9117824 ◽

2020 ◽

Author(s):

T. Maeda ◽

H. Ishii ◽

W. H. Chang ◽

H. Kanaya ◽

T. Asano

Keyword(s):

Quantum Well ◽

Metal Oxide ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Thz Wave ◽

Wave Detection

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Transmission electron microscopy studies of regrown GaN Ohmic contacts on patterned substrates for metal oxide semiconductor field effect transistor applications

Applied Physics Letters ◽

10.1063/1.2741123 ◽

2007 ◽

Vol 90 (20) ◽

pp. 204106 ◽

Cited By ~ 12

Author(s):

Y. N. Saripalli ◽

L. Pei ◽

T. Biggerstaff ◽

S. Ramachandran ◽

G. J. Duscher ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Metal Oxide ◽

Field Effect ◽

Ohmic Contacts ◽

Field Effect Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Transmission Electron ◽

Effect Transistor

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Characterization of interface states in AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors with HfO2 gate dielectric grown by atomic layer deposition

Applied Surface Science ◽

10.1016/j.apsusc.2018.05.191 ◽

2018 ◽

Vol 461 ◽

pp. 255-259 ◽

Cited By ~ 3

Author(s):

R. Stoklas ◽

D. Gregušová ◽

S. Hasenöhrl ◽

E. Brytavskyi ◽

M. Ťapajna ◽

...

Keyword(s):

Field Effect ◽

Gate Dielectric ◽

Field Effect Transistors ◽

Atomic Layer ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Heterostructure ◽

Layer Deposition ◽

Heterostructure Field Effect Transistors

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Characterization of core/shell bi-metallic cube-shaped nanoparticles with scanning transmission electron microscopy

Microscopy and Microanalysis ◽

10.1017/s1431927615006133 ◽

2015 ◽

Vol 21 (S3) ◽

pp. 1069-1070

Author(s):

Dalaver H. Anjum ◽

Akshaya Samal ◽

Manuel A. Roldan-Gutierrez

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Core Shell ◽

Scanning Transmission Electron ◽

Shaped Nanoparticles ◽

Transmission Electron ◽

Scanning Transmission

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