Surface Smoothing of Compound Semiconductor Substrates with Gas Cluster Ion Beams

2003 ◽  
Author(s):  
S. Houzumi
Keyword(s):  
Compound Semiconductor ◽  
Ion Beams ◽  
Surface Smoothing ◽  
Semiconductor Substrates ◽  
Cluster Ion Beams ◽  
Cluster Ion

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

Surface smoothing effects with reactive cluster ion beams

1998 ◽  
Vol 54 (1-3) ◽  
pp. 106-110 ◽  
Author(s):  
Noriaki Toyoda ◽  
Hiroaki Kitani ◽  
Norihisa Hagiwara ◽  
Jiro Matsuo ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Smoothing Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Reactive Cluster

scholarly journals The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams

2011 ◽  
Vol 36 (3) ◽  
pp. 309-312 ◽  
Author(s):  
K. Ichiki ◽  
S. Ninomiya ◽  
T. Seki ◽  
T. Aoki ◽  
J. Matsuo
Keyword(s):  
Cluster Size ◽  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion

Surface Smoothing of Polycrystalline Substrates with Gas Cluster Ion Beams

2010 ◽  
Vol 49 (6) ◽  
pp. 06GH09 ◽  
Author(s):  
Takafumi Mashita ◽  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas
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