Spatially resolved electron energy-loss spectroscopy of an interfacial structure at a Ti thin film Cu interconnect

Nobuyuki Ikarashi; Makoto Ueki; Masayuki Hiroi

doi:10.1063/1.1596725

Spatially resolved electron energy-loss spectroscopy of an interfacial structure at a Ti thin film Cu interconnect

Applied Physics Letters ◽

10.1063/1.1596725 ◽

2003 ◽

Vol 83 (4) ◽

pp. 686-688 ◽

Cited By ~ 1

Author(s):

Nobuyuki Ikarashi ◽

Makoto Ueki ◽

Masayuki Hiroi

Keyword(s):

Thin Film ◽

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Interfacial Structure ◽

Spatially Resolved ◽

Cu Interconnect ◽

Electron Energy Loss

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Characterization of the interface between the Hf-based high-k thin film and the Si using spatially resolved electron energy-loss spectroscopy

Micron ◽

10.1016/j.micron.2009.07.009 ◽

2010 ◽

Vol 41 (1) ◽

pp. 15-19 ◽

Cited By ~ 5

Author(s):

X.F. Wang ◽

Quan Li ◽

P.F. Lee ◽

J.Y. Dai ◽

X.G. Gong

Keyword(s):

Thin Film ◽

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Spatially Resolved ◽

High K ◽

Electron Energy Loss

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Heterojunction band lineups in Si-Ge alloys using spatially resolved electron-energy-loss spectroscopy

Physical Review B ◽

10.1103/physrevb.47.4107 ◽

1993 ◽

Vol 47 (7) ◽

pp. 4107-4110 ◽

Cited By ~ 45

Author(s):

J. F. Morar ◽

P. E. Batson ◽

J. Tersoff

Keyword(s):

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Spatially Resolved ◽

Electron Energy Loss

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Spatially resolved electron energy loss spectroscopy on n-type ultrananocrystalline diamond films

Applied Physics Letters ◽

10.1063/1.3095663 ◽

2009 ◽

Vol 94 (11) ◽

pp. 111905 ◽

Cited By ~ 13

Author(s):

R. Arenal ◽

O. Stephan ◽

P. Bruno ◽

D. M. Gruen

Keyword(s):

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Diamond Films ◽

Spatially Resolved ◽

Ultrananocrystalline Diamond ◽

Electron Energy Loss

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Application of high‐resolution electron energy loss spectroscopy to the adsorption and the photoreaction of CH2I2 and CD3OD on a MoOx thin film

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579469 ◽

1995 ◽

Vol 13 (6) ◽

pp. 2689-2697 ◽

Cited By ~ 4

Author(s):

Hong He ◽

Junji Nakamura ◽

Naoki Takehiro ◽

Ken‐ichi Tanaka

Keyword(s):

Thin Film ◽

High Resolution ◽

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Resolution Electron ◽

Electron Energy Loss

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Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM

Journal of Electron Microscopy ◽

10.1093/jmicro/51.5.291 ◽

2002 ◽

Vol 51 (5) ◽

pp. 291-296 ◽

Cited By ~ 14

Author(s):

S. Terada

Keyword(s):

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Time Resolved ◽

Spatially Resolved ◽

Energy Filtering ◽

Electron Energy Loss ◽

Acquisition Technique

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Visualization of Electrochemical Reactions in All-Solid-State Li-Ion Batteries by Spatially Resolved Electron Energy-Loss Spectroscopy and Electron Holography

MATERIALS TRANSACTIONS ◽

10.2320/matertrans.m2015014 ◽

2015 ◽

Vol 56 (5) ◽

pp. 617-624 ◽

Cited By ~ 5

Author(s):

Kazuo Yamamoto ◽

Yasutoshi Iriyama ◽

Tsukasa Hirayama

Keyword(s):

Solid State ◽

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electrochemical Reactions ◽

Electron Holography ◽

Li Ion Batteries ◽

Spatially Resolved ◽

Li Ion ◽

Electron Energy Loss

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Chemistry of grain boundaries in calcia doped silicon nitride studied by spatially resolved electron energy-loss spectroscopy

Analytica Chimica Acta ◽

10.1016/0003-2670(94)00058-1 ◽

1994 ◽

Vol 297 (1-2) ◽

pp. 97-108 ◽

Cited By ~ 23

Author(s):

John Bruley ◽

I. Tanaka ◽

H.-J. Kleebe ◽

M. Rühle

Keyword(s):

Silicon Nitride ◽

Energy Loss ◽

Grain Boundaries ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Spatially Resolved ◽

Doped Silicon ◽

Electron Energy Loss

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Spin-wave excitation observed by spin-polarized electron energy loss spectroscopy: a new method for the investigation of surface- and thin-film spin waves on the atomic scale

Thin Solid Films ◽

10.1016/j.tsf.2004.06.029 ◽

2004 ◽

Vol 464-465 ◽

pp. 42-47 ◽

Cited By ~ 17

Author(s):

R. Vollmer ◽

M. Etzkorn ◽

P.S.Anil Kumar ◽

H. Ibach ◽

J. Kirschner

Keyword(s):

Thin Film ◽

Energy Loss ◽

Electron Energy ◽

Spin Wave ◽

Electron Energy Loss Spectroscopy ◽

Atomic Scale ◽

Wave Excitation ◽

Spin Polarized ◽

Spin Wave Excitation ◽

Electron Energy Loss

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SUB-NM Spatially Resolved Electron Energy-Loss Spectroscopy

Handbook of Microscopy for Nanotechnology ◽

10.1007/1-4020-8006-9_21 ◽

2006 ◽

pp. 653-681

Author(s):

Christian Colliex ◽

Odile StÈphan

Keyword(s):

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Spatially Resolved ◽

Electron Energy Loss

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Probing free carrier plasmons in doped semiconductors using spatially resolved electron energy loss spectroscopy

Physical Review B ◽

10.1103/physrevb.102.205427 ◽

2020 ◽

Vol 102 (20) ◽

Author(s):

Hongbin Yang ◽

Eric L. Garfunkel ◽

Philip E. Batson

Keyword(s):

Energy Loss ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Free Carrier ◽

Doped Semiconductors ◽

Spatially Resolved ◽

Electron Energy Loss

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