Investigation of a steady-state cylindrical magnetron discharge for plasma immersion treatment

I. Levchenko; M. Romanov; M. Keidar

doi:10.1063/1.1590054

Investigation of a steady-state cylindrical magnetron discharge for plasma immersion treatment

Journal of Applied Physics ◽

10.1063/1.1590054 ◽

2003 ◽

Vol 94 (3) ◽

pp. 1408-1413 ◽

Cited By ~ 39

Author(s):

I. Levchenko ◽

M. Romanov ◽

M. Keidar

Keyword(s):

Steady State ◽

Magnetron Discharge ◽

Cylindrical Magnetron

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Analysis of a one-dimensional, steady-state magnetron discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/30/18/012 ◽

1997 ◽

Vol 30 (18) ◽

pp. 2573-2584 ◽

Cited By ~ 35

Author(s):

N F Cramer

Keyword(s):

Steady State ◽

Magnetron Discharge ◽

One Dimensional

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Experimental Study of Axial Plasma Parameter Variations in the Cylindrical Magnetron Discharge

10.1063/1.1593870 ◽

2003 ◽

Author(s):

P. Kudrna

Keyword(s):

Experimental Study ◽

Plasma Parameter ◽

Magnetron Discharge ◽

Cylindrical Magnetron ◽

Parameter Variations

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Two-dimensional nonlocal model of axially and radially inhomogeneous plasma of cylindrical magnetron discharge

Physical Review E ◽

10.1103/physreve.68.016401 ◽

2003 ◽

Vol 68 (1) ◽

Cited By ~ 8

Author(s):

I. A. Porokhova ◽

Yu. B. Golubovskii ◽

M. Holík ◽

P. Kudrna ◽

M. Tichý ◽

...

Keyword(s):

Inhomogeneous Plasma ◽

Nonlocal Model ◽

Two Dimensional ◽

Magnetron Discharge ◽

Cylindrical Magnetron ◽

Radially Inhomogeneous

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An experimental study of plasma density determination by a cylindrical Langmuir probe at different pressures and magnetic fields in a cylindrical magnetron discharge in heavy rare gases

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/30/12/013 ◽

1997 ◽

Vol 30 (12) ◽

pp. 1763-1777 ◽

Cited By ~ 72

Author(s):

E Passoth ◽

P Kudrna ◽

C Csambal ◽

J F Behnke ◽

M Tichý ◽

...

Keyword(s):

Experimental Study ◽

Magnetic Fields ◽

Plasma Density ◽

Langmuir Probe ◽

Rare Gases ◽

Magnetron Discharge ◽

Cylindrical Magnetron ◽

Density Determination ◽

Cylindrical Langmuir Probe

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Radial behaviour of the electron energy distribution function in the cylindrical magnetron discharge in argon

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/32/20/312 ◽

1999 ◽

Vol 32 (20) ◽

pp. 2655-2665 ◽

Cited By ~ 22

Author(s):

E Passoth ◽

J F Behnke ◽

C Csambal ◽

M Tichý ◽

P Kudrna ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Magnetron Discharge ◽

Cylindrical Magnetron ◽

Radial Behaviour

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Kinetic Modeling Of Axially Non-Uniform Cylindrical Magnetron Discharge

10.1063/1.1593971 ◽

2003 ◽

Author(s):

I. A. Porokhova

Keyword(s):

Kinetic Modeling ◽

Magnetron Discharge ◽

Cylindrical Magnetron

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PIC-MCC Modeling of the Cylindrical Magnetron Discharge

10.1063/1.1593972 ◽

2003 ◽

Author(s):

P. Kudrna

Keyword(s):

Magnetron Discharge ◽

Cylindrical Magnetron

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Transverse electric field and density gradient induced instabilities in a cylindrical magnetron discharge

Physics of Plasmas ◽

10.1063/1.873808 ◽

2000 ◽

Vol 7 (1) ◽

pp. 391-402 ◽

Cited By ~ 13

Author(s):

T. A. van der Straaten ◽

N. F. Cramer

Keyword(s):

Electric Field ◽

Density Gradient ◽

Transverse Electric ◽

Transverse Electric Field ◽

Magnetron Discharge ◽

Cylindrical Magnetron

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Anisotropy of the electron component in a cylindrical magnetron discharge. II. Application to real magnetron discharge

Physical Review E ◽

10.1103/physreve.71.066407 ◽

2005 ◽

Vol 71 (6) ◽

Cited By ~ 6

Author(s):

I. A. Porokhova ◽

Yu. B. Golubovskii ◽

J. F. Behnke

Keyword(s):

Electron Component ◽

Magnetron Discharge ◽

Cylindrical Magnetron

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Stable plasma configurations in a cylindrical magnetron discharge

Applied Physics Letters ◽

10.1063/1.1792795 ◽

2004 ◽

Vol 85 (12) ◽

pp. 2202-2204 ◽

Cited By ~ 37

Author(s):

I. Levchenko ◽

M. Romanov ◽

M. Keidar ◽

I. I. Beilis

Keyword(s):

Magnetron Discharge ◽

Cylindrical Magnetron ◽

Stable Plasma

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