scholarly journals Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films

2003 ◽  
Vol 82 (24) ◽  
pp. 4328-4330 ◽  
Author(s):  
T. Rajagopalan ◽  
B. Lahlouh ◽  
J. A. Lubguban ◽  
N. Biswas ◽  
S. Gangopadhyay ◽  
...  
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