Radio frequency magnetron sputtering deposition of calcium phosphate coatings: Monte Carlo simulations of the deposition process and depositions through an aperture

2003 ◽  
Vol 93 (1) ◽  
pp. 662-670 ◽  
Author(s):  
B. Feddes ◽  
J. G. C. Wolke ◽  
J. A. Jansen ◽  
A. M. Vredenberg
Keyword(s):  
Monte Carlo ◽  
Calcium Phosphate ◽  
Magnetron Sputtering ◽  
Monte Carlo Simulations ◽  
Radio Frequency ◽  
Deposition Process ◽  
Radio Frequency Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Phosphate Coatings ◽  
Calcium Phosphate Coatings

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale

Magnetron Sputtering Deposition of Calcium Phosphate Films with Nanoscale Grain Morphology in their Surface

2006 ◽  
Vol 975 ◽  
Author(s):  
Wilfredo Otaño ◽  
Víctor M. Pantojas ◽  
Juan M. Figueroa ◽  
Darimar Hernández ◽  
Alejandro Rodríguez-Navarro
Keyword(s):  
Calcium Phosphate ◽  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Deposition Time ◽  
Grain Morphology ◽  
Average Diameter ◽  
Deposition Process ◽  
Medical Implants ◽  
Sputtering Deposition ◽  
Coated Implant

ABSTRACTHydroxyapatite (HA) is a calcium phosphate mineral analogous to the mineral part of bone. This similarity makes this material bioactive and suitable to coat medical implants. However, at present, there is not a coating technique which gives the coated implant the desired properties and long life required for medical implants.In an effort to produce HA coatings with improved properties, calcium phosphate films were prepared using magnetron sputtering deposition on a silicon substrate at 600°C. Initial efforts resulted in the deposition of amorphous films with a distinctive grain-like surface morphology. The morphological grain size was studied using SEM and found that it was possible to control the average diameter value of the round shaped grains by adjusting the deposition time. Increasing the deposition time increases the mean grain diameter. EDS spectra showed the unintentional addition of carbon, iron and nickel to the samples during deposition. After eliminating the impurities, it was possible to prepare calcium phosphate films in the HA phase but without the grain-like surface morphology. These results suggested that the impurities prevented the formation of the calcium phosphate HA phase while acting as nuclei for the heterogeneous nucleation of the grains. This is an important result where the deposition process parameters can be controlled to functionalize the films in order to produce distinctive nanoscale features in the surface morphology.

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