Realization of high efficiency in a plasma-assisted microwave source with two-dimensional electron motion

2002 ◽  
Vol 9 (10) ◽  
pp. 4114-4117 ◽  
Author(s):  
A. G. Shkvarunets ◽  
Y. Carmel ◽  
G. S. Nusinovich ◽  
T. M. Abu-elfadl ◽  
J. Rodgers ◽  
...  
2005 ◽  
Vol 131 ◽  
pp. 241-246
Author(s):  
R. M. Lewis ◽  
Y. P. Chen ◽  
G. Sambandamurthy ◽  
L. W. Engel ◽  
D. C. Tsui ◽  
...  

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