Realization of high efficiency in a plasma-assisted microwave source with two-dimensional electron motion
Keyword(s):
Keyword(s):
1984 ◽
Vol 127
(1-3)
◽
pp. 388-388
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1991 ◽
Vol 161
(6)
◽
pp. 201
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2002 ◽
Vol 57
(2-3)
◽
pp. 11
2005 ◽
Vol 63
(5)
◽
pp. 405-417